Thin Solid Films
 2009
DOI: 10.1016/j.tsf.2008.11.144
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Optical properties of ion-implanted silicon and separation by implantation of oxygen silicon-on-insulator substrates in the infrared: Study of B+ and P2+ implantation doping

C. C. Katsidis
1
,
D. Siapkas
2
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