Optical Properties of Carbon Films Obtained by Plasma-Enhanced Chemical Vapor Deposition

Sha, Bo; Lukianov, Anatolii; Klyui, N.I.; Dusheiko, Mykhailo; Kasatkin, V.P.; Lozinskii, V. B.; Yakymenko, Yuriy

doi:10.1109/elnano.2019.8783283

2019 IEEE 39th International Conference on Electronics and Nanotechnology (ELNANO) 2019

DOI: 10.1109/elnano.2019.8783283

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Optical Properties of Carbon Films Obtained by Plasma-Enhanced Chemical Vapor Deposition

Bo Sha

Anatolii Lukianov

N.I. Klyui

et al.

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2022

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Optical Properties of Carbon Films Obtained by Plasma-Enhanced Chemical Vapor Deposition

Cited by 1 publication

References 19 publications

Fabrication and applications of the optical diamond-like carbon films: a review

Fabrication and applications of the optical diamond-like carbon films: a review

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