Optical pressure sensor head fabrication using ultrathin silicon wafer anodic bonding

Beggans, Michael Howard; Ivanov, D.; Fu, Steven; Digges, T.G.; Farmer, K.R.

doi:10.1117/12.341272

Cited by 4 publications

(4 citation statements)

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“…These advantages make optical fiber sensors excellent candidates for PD acoustic detection. Optically interrogated pressure sensors have been demonstrated in various configurations using microelectromechanical system (MEMS) technology [6][7][8][9][10][11][12], but sensitivities of these devices are low for PD acoustic signal detection. In this paper, we describe an ultrasensitive optical sensor for PD acoustic detection.…”

Section: Introductionmentioning

confidence: 99%

An ultra-sensitive optical MEMS sensor for partial discharge detection

Wang

Xiao

et al. 2004

J. Micromech. Microeng.

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A diaphragm-based interferometric fiber optical microelectromechanical system sensor with high sensitivity is designed and tested for on-line detection of the acoustic waves generated by partial discharges (PD) inside high-voltage power transformers. In principle, the sensor is made according to Fabry Perot interference, which is placed on a micro-machined rectangular silicon membrane as a pressure-sensitive element. A fiber-optic readout scheme has been used to monitor sensor membrane deflection. Sensor design, fabrication, characterization, and application in PD acoustic detection are described. Test results indicate that the fiber optical sensor is capable of detecting PD acoustic signals propagating inside transformer oil with high sensitivity.

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Section: Introductionmentioning

confidence: 99%

An ultra-sensitive optical MEMS sensor for partial discharge detection

Wang

Xiao

et al. 2004

J. Micromech. Microeng.

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“…While, the optical-based devices can convert the external stimuli into modulations of the wavelength or phase angle of a light beam, for instance, the classic fiber Bragg gratings and the interferometric sensors. [50][51][52][53][54][55] In comparison with the optical counterparts, the electrical sensors can typically possess high system flexibility, small footprint, easiness-to-integrate and straightforward signal conversion. It has become preferred sensing modalities in many recent implementations of medical and flexible electronics.…”

Section: Introductionmentioning

confidence: 99%

First Decade of Interfacial Iontronic Sensing: From Droplet Sensors to Artificial Skins

et al. 2020

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Over the past decade, a brand‐new pressure‐ and tactile‐sensing modality, known as iontronic sensing has emerged, utilizing the supercapacitive nature of the electrical double layer (EDL) that occurs at the electrolytic–electronic interface, leading to ultrahigh device sensitivity, high noise immunity, high resolution, high spatial definition, optical transparency, and responses to both static and dynamic stimuli, in addition to thin and flexible device architectures. Together, it offers unique combination of enabling features to tackle the grand challenges in pressure‐ and tactile‐sensing applications, in particular, with recent interest and rapid progress in the development of robotic intelligence, electronic skin, wearable health as well as the internet‐of‐things, from both academic and industrial communities. A historical perspective of the iontronic sensing discovery, an overview of the fundamental working mechanism along with its device architectures, a survey of the unique material aspects and structural designs dedicated, and finally, a discussion of the newly enabled applications, technical challenges, and future outlooks are provided for this promising sensing modality with implementations. The state‐of‐the‐art developments of the iontronic sensing technology in its first decade are summarized, potentially providing a technical roadmap for the next wave of innovations and breakthroughs in this field.

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“…Pressure and temperature sensors interrogated with light propagating in optical fibers have been demonstrated in various configurations using microelectromechanical systems (MEMS) technology [1][2][3][4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

“…MEMS technology is effective for manufacturing of these sensors because the small and precise size of sensing elements results in considerable flexibility in choosing measurand response ranges, bandwidth and sensitivity. Optical interrogation of these sensing elements presents an opportunity to extend use of these sensors to harsh 5 Formerly with Taitech Inc., AMC PO Box 33630, WPAFB, OH 45433-0630, USA. environments (EM interference, high temperature, vibration, dust, etc) in which electronics cannot operate.…”

Section: Introductionmentioning

confidence: 99%

Novel MEMS pressure and temperature sensors fabricated on optical fibers

Abeysinghe

Dasgupta

Jackson

et al. 2002

J. Micromech. Microeng.

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This thesis presents the design, fabrication, and testing of novel MEMS pressure and temperature sensors fabricated on optical fiber end faces. A simple micromachining process compatible with MEMS was developed in fabricating sensors directly on optical fibers. The pressure sensor configuration involves anodic bonding of a piece of an extremely thin silicon wafer onto the fiber end face over a cavity etched in the central portion of the fiber end face. Final device diameter is thus the same as that of the optical fiber. The temperature sensor is based on anodically bonding a thin piece of silicon onto the fiber end face. The pressure sensors were fabricated on 400 µm diameter fibers while temperature sensors were fabricated on both 200 and 400 µm diameter fibers. Pressure measurements were made over the 14 to 80 psi range while temperature measurements were made over the 23 to 300 0 C range. Pressure sensor sensitivities of 0.1 mV/psi and 0.2 mV/psi were obtained. The pressure sensors were designed with cavity diameter d=150 µm, and cavity depth h=0.640 µm. Diaphragm thickness for the two sensors were t=7.1, and t=3.4 µm. Higher sensitivity was achieved by design of a sensor with the thinner diaphragm. A sensor array fabrication effort demonstrated that our micromachining process could be extended to simultaneous processing of an array of fibers. The temperature sensor was fabricated by bonding 3.1 µm thick silicon onto the fiber end face. An oxidant-resistant encapsulation scheme for the temperature sensor was proposed, namely aluminum coated silicon nitride (Al/Si 3 N 4). The uncoated side of silicon was bonded to a fiber end face using the anodic bonding method. The measured values of κ φ =λ m-1 dλ m /dT for capped and uncapped sensors were κ φ =(7.5±0.6)×10-5 / 0 C, and κ φ =(7.2±0.1)×10-5 / 0 C respectively. The measured κ φ value for the uncapped sensor is equal to that which was iii determined using the published material properties for crystalline silicon (κ φ 7.9×10-5 / 0 C) within measurement uncertainty. The micromachining process developed for micromachining fiber end faces along with the bonding of silicon to fiber end faces can be extended to fabrication of other MEMS based microoptic devices where fiber optic interrogation is advantageous. First of all, I want to thank my co-advisers Professors Joseph T. Boyd, and Howard E. Jackson for their invaluable guidance, and generous support throughout my thesis project. Their formative influence on my way of thinking about research will continue well beyond the completion of this thesis. I am indebted to Dr. Boyd for introducing me to an exciting thesis project in the area of Optical MEMS and supervising me in such a manner that enabled me to progress and learn in a timely manner. I feel fortunate in associating such a kind and good person. This thesis would not exist without Dr. Jackson, who accepted me as a doctoral student, at a very difficult time of my life, and who believed in my declaration of dedication. His professionalism, guidance, energy, humor...

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Optical pressure sensor head fabrication using ultrathin silicon wafer anodic bonding

Cited by 4 publications

References 0 publications

An ultra-sensitive optical MEMS sensor for partial discharge detection

An ultra-sensitive optical MEMS sensor for partial discharge detection

First Decade of Interfacial Iontronic Sensing: From Droplet Sensors to Artificial Skins

Novel MEMS pressure and temperature sensors fabricated on optical fibers

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