Optical performance simulation and optimization for CMOS image sensor pixels

Gao, Tiecheng; Yao, Suying; Huo, Xiao-Lei

doi:10.1016/j.ijleo.2013.05.058

Cited by 3 publications

(1 citation statement)

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“…They have already been widely applied to cover lenses of image sensors [1,2], illumination homogenizers [3,4], interconnection optics of optical fibers [5,6], and solar cells [7,8]. In addition to making light-spot arrays, they are also used for making image arrays, and various new applications are reported or proposed [9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Concave Resist Patterns for the Use of Reversal Molds of High-Density Micro-Lens Arrays

Horiuchi

Sasaki

2016

J. Photopol. Sci. Technol.

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Almost spherical concave resist patterns in a dense array were fabricated to be used as reversal molds of plastic convex micro-lens arrays. In the past research, such micro-lens arrays were replicated using concave metal molds fabricated by replicating original convex resist patterns. However, it was difficult to fabricate the original convex resist patterns densely in a matrix. In addition, because two replication processes from resist to metal and from metal to plastic resin were necessary, procedures were very complicated, and it took long times for obtaining final plastic resin lens arrays. In the new method, original concave mold patterns were obtained by simple 1/19 projection-exposure lithography including only one exposure and one development by applying largely defocused exposure intentionally. Despite the simplicity, very wide-range curvature radiuses of 25-120 μm were obtained by giving various exposure doses even using reticles with same 500-μm transparent square patterns. It was basically checked that epoxy resin lens arrays were obtained by mechanically separating them from the concave resist molds.

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