Abstract:Designing and operating exposure tools with a stable imaging performance becomes increasingly challenging as the exposure wavelength is decreased to improve resolution capabilities. At a wavelength of 157 nm, light is highly absorbed by most materials. In addition, the high photon energies readily induce photochemical degradation of the majority of organic materials. As a result many of the materials in the optical path of 157 nm exposure tools have been replaced and more stringent controls on the purge gas qu… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.