Optical metrology for resonant surface acoustic wave in RF device

Abstract

Unlike the electric method capable of checking only product defect, the real time optical metrology is suggested for measuring and visualizing vibration with respect to position of surface acoustic wave in RF device. The measuring limits and conditions for surface acoustic wave is given, and the interference and diffraction due to RF signal are analyzed by optical interpretation. A single mode laser and a 105MHz-center-frequency repeater filter were employed for experiments and theoretical analysis. In this paper, the optical metrology providing visual energy distribution and real time inspection for surface acoustic wave is proposed for development of high quality multi-service and multi-frequency RF module.

Static and Dynamic Behavior of Tunable DFB Laser based on Modal Transmission-Line Theory

“…그러나, 활성영역을 갖는 2단 DFB 레이저 광원과 같 이 이득과 캐리어 밀도 사이에 강한 상관성이 있는 소자 들의 정적 특성을 분석할 때 아래와 같은 실험에 의존하 는 비선형 특성의 이득-밀도 관계식을 사용해야만 한다 [10] . (6) 여기서,         는 각각 실험결과로부터 결정된 물 리적 값들이다.…”