Optical MEMS pressure sensor based on a mesa-diaphragm structure

Ge, Yixian; Wang, Ming; Yan, Haitao

doi:10.1364/oe.16.021746

Cited by 25 publications

(13 citation statements)

References 8 publications

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“…The material of the annular CD was 316L stainless steel with a radius of 4600 µm, a thickness of 30 µm, a corrugation depth of 60 µm and a corrugation width of 750 µm. Experimental results showed that the sensor had good linearity over the pressure range of 0~0.1 MPa, and the sensitivity was up to 518 µm /MPa, compared with the pressure sensor with the boss structure in the central area of the diaphragm which, was designed by their group [57] in 2008; the sensitivity was increased by two orders of magnitude. In 2017, Zhu Jiali et al [20] designed and fabricated an annular CD-based fiber-optic pressure sensor with a novel F-P structure, which further improved the sensitivity of the sensor and reduced the influence of temperature on the measurement accuracy of the sensor.…”

Section: In the Miniature Fiber-optic Static Pressure Sensorsmentioning

confidence: 97%

Reviews on Corrugated Diaphragms in Miniature Fiber-Optic Pressure Sensors

Dai

Zheng

et al. 2019

Applied Sciences

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Corrugated diaphragms (CDs) have been widely used in many fields because of their higher pressure sensitivity and wider linear range compared to flat diaphragms (FDs) in the same circumstances. Especially in the application of miniature fiber-optic pressure sensors, the introduction of the corrugated structure gives the sensor high sensitivity, large dynamic range, good linearity, small hysteresis, good stability, and so on. Research on CD-based miniature fiber-optic pressure sensors has gradually attracted more attention in recent years. In this paper, the principles of operation of a miniature fiber-optic pressure sensor are briefly introduced, then the mechanical properties of FD and CD, as well as their influences on the performance of the sensor, are analyzed in detail. The application status of CDs in miniature fiber-optic pressure sensors is reviewed, and our conclusions and the prospects for the application of CDs in miniature fiber-optic pressure sensors are given finally.

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Section: In the Miniature Fiber-optic Static Pressure Sensorsmentioning

confidence: 97%

Reviews on Corrugated Diaphragms in Miniature Fiber-Optic Pressure Sensors

Dai

Zheng

et al. 2019

Applied Sciences

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“…However, the underlying microsilicon technology is of major significance because it helped fuel revolutionary growth in non-resonant fibre-optically addressed MEMS [8] and silicon-on-insulator (hybrid silicon) photonics [9][10][11][12]. Often exploiting interferometric methods of signal transduction, such technologies are used in both sensing and interrogation.…”

Section: Fibre-optic Microelectromechanical Systems (Mems)mentioning

confidence: 99%

Advanced materials and techniques for fibre-optic sensing

Henderson

2014

IOP Conf. Ser.: Mater. Sci. Eng.

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Abstract. Fibre-optic monitoring systems came of age in about 1999 upon the emergence of the world's first significant commercialising company -a spin-out from the UK's collaborative MAST project. By using embedded fibre-optic technology, the MAST project successfully measured transient strain within high-performance composite yacht masts. Since then, applications have extended from smart composites into civil engineering, energy, military, aerospace, medicine and other sectors. Fibre-optic sensors come in various forms, and may be subject to embedment, retrofitting, and remote interrogation. The unique challenges presented by each implementation require careful scrutiny before widespread adoption can take place. Accordingly, various aspects of design and reliability are discussed spanning a range of representative technologies that include resonant microsilicon structures, MEMS, Bragg gratings, advanced forms of spectroscopy, and modern trends in nanotechnology.

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“…Optical fiber sensors based on F-P interferometer are widely used in acoustic and pressure detection due to their high sensitivity and wide frequency spectrum response, which are determined by the acoustic diaphragm fabricated with the MEMS technology [4]. Researchers employed many different techniques to sense a wide variety of measurands which include pressure [5][6][7], sound [4], strain [8][9][10], temperature [10], and displacement [11], while employed different diaphragm structures which include flat diaphragm [4][5][6][7][8][9][10][11], corrugated diaphragm [12], mesa-diaphragm [6], and photoniccrystal diaphragm [13][14][15]. The diaphragm of the F-P sensor sensing acoustic signals is a separate extrinsic sensing element.…”

Section: Introductionmentioning

confidence: 99%