Optical Measurement of Intrinsic Stress During Deposition: Application to the Determination of the Substrate Nature Influence on Stresses in Chromium Films

Moulard, G.; Contoux, G.; Motyl, Guy; Courbon, M.

doi:10.1615/hightempmatproc.v2.i3.120

High Temp Mat Proc

1998

DOI: 10.1615/hightempmatproc.v2.i3.120

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Optical Measurement of Intrinsic Stress During Deposition: Application to the Determination of the Substrate Nature Influence on Stresses in Chromium Films

G. Moulard¹,

G. Contoux²,

Guy Motyl³

et al.

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Optical Measurement of Intrinsic Stress During Deposition: Application to the Determination of the Substrate Nature Influence on Stresses in Chromium Films

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