Optical Manipulation of Microparticles in an SU-8/PDMS Hybrid Microfluidic Chip Incorporating a Monolithically Integrated On-Chip Lens Set

Guo, Honglei; Xiao, Gaozhi; Zhang, Zhiyi; Yao, Jianping

doi:10.1109/jstqe.2009.2033212

Cited by 9 publications

(1 citation statement)

References 32 publications

(40 reference statements)

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“…For their construction various techniques are used [47]. The polymer SU-8 may be used both for the construction of mechanical and waveguide structures [8]. Thanks to the rather simple technique of depositing the layers and shaping of volumetric structures the polymer SU-8 [9] is frequently applied in prototype structures MEMS and MOEMS.…”

Section: Introductionmentioning

confidence: 99%

The Sensitivity of Composite Bimodal Waveguide SU-8

Gut

2013

Acta Phys. Pol. A

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This paper presents the results of measurements of the refractive index and thickness of the waveguide layer SU-8. The mode sensitivity has been calculated as a function of the thickness in a bimodal structure. The dierential interference was analyzed concerning modes of the same types TE0TE1 and TM0TM1 and modes of the same order (TE0TM0, TE1TM1). The thickness of the layer was determined when the interferometer is most sensitive to changes of the refractive index. It has been proved that the sensitivity of the structure can be increased by adding a nanometric layer with a high refraction index (nA = 1.975) on the waveguide layer.

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Section: Introductionmentioning

confidence: 99%

The Sensitivity of Composite Bimodal Waveguide SU-8

Gut

2013

Acta Phys. Pol. A

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Optofluidic Techniques for the Manipulation of Micro Particles: Principles and Applications to Bioanalyses

2012

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Optical Detection Systems on Microfluidic Chips

Gai

Yeung

2011

Microfluidics

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Optical detection continues to dominate detection methods in microfluidics due to its noninvasive nature, easy coupling, rapid response, and high sensitivity. In this review, we summarize two aspects of recent developments in optical detection methods on microfluidic chips. The first aspect is free-space (off-chip) detection on the microchip, in which the conventional absorption, fluorescence, chemiluminescence, surface plasmon resonance, and surface enhanced Raman spectroscopies are involved. The second aspect is the optofluidic (inside-chip) detection. Various miniaturized optical components integrated on the microfluidic chip, such as waveguide, microlens, laser, and detectors are outlined.

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Optical Manipulation of Microparticles in an SU-8/PDMS Hybrid Microfluidic Chip Incorporating a Monolithically Integrated On-Chip Lens Set

Cited by 9 publications

References 32 publications

The Sensitivity of Composite Bimodal Waveguide SU-8

The Sensitivity of Composite Bimodal Waveguide SU-8

Optofluidic Techniques for the Manipulation of Micro Particles: Principles and Applications to Bioanalyses

Optical Detection Systems on Microfluidic Chips

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