Abstract:The success of optical interconnection for practical use is strongly dependent on the development of a sophisticated packaging and coupling technology capable of both high coupling efficiency and easy alignment. We have developed the photomask transfer method applying UV curable resin. This technology enables fabrication of arrayed M x N optical patterns at one shot of UV light. It is also possible to fabricate very precise patterns by a conventional photomask. The length/thickness of the fabricated patterns c… Show more
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