Optical inspection of solar cells using phase-sensitive optical coherence tomography

Tsai, Meng-Tsan; Chang, Fu; Yao, Yung Chi; Mei, Jie; Lee, Ya Ju

doi:10.1016/j.solmat.2015.01.016

Cited by 20 publications

(4 citation statements)

References 26 publications

(29 reference statements)

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“…Occasionally, applications that can monitor material properties require inexpensive layer detection systems, and a scan rate in the kiloHertz range is sufficient. 16…”

Section: Resultsmentioning

confidence: 99%

Simultaneous en-face imaging of multiple layers with multiple reference optical coherence tomography

et al. 2017

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A technique based on multiple reference optical coherence tomography (MR-OCT) is proposed for simultaneous imaging at multiple depths. The technique has been validated by imaging a reference sample and a fingerprint in-vivo. The principle of scanning multiple selected layers is shown by imaging a partial fingerprint with 200×200×200 voxels of 3×3×0.5 mm size and obtaining an arbitrary amount of layers merely by digital processing. The spacing among the layers can be adjusted arbitrarily, and the SNR roll-off is shown for three different spacings. At a mirror scan frequency of 1 kHz and an A-line rate of 2 kHz, the acquisition time was 20 s for one volume. The results show the feasibility of the application of layer scanning MR-OCT that uses a partial mirror in the reference arm of the Michelson interferometer. The reduced scan range required for layer scanning allows even higher scan rates that are limited only by the voice coil design and the mass-spring system, e.g., mirror mass, spring constant, and damping.

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“…Occasionally, applications that can monitor material properties require inexpensive layer detection systems, and a scan rate in the kiloHertz range is sufficient. 16…”

Section: Resultsmentioning

confidence: 99%

Simultaneous en-face imaging of multiple layers with multiple reference optical coherence tomography

et al. 2017

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“…Both, swept-source, and spectraldomain OCT, can achieve easily imaging frame rate over 100 frames per second. Due the similarities of these techniques, the methods applied in WSI for phase retrieval and an absolute optical path distance determination [19], have also been recently applied with OCT signal for topography of a cornea [20] and a solar cell inspection [21].…”

Section: Introductionmentioning

confidence: 99%

Wavelength Scanning Interferometry for Topography of Microchannels at Roll-to-Roll Line with Optical Coherence Tomography

Lauri

Liedert

Fabritius

2021

2021 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)

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Roll-to-roll (R2R) process is mass manufacturing method that can produce various products ranging from printed electronics to microfluidics. Microfluidics, used in biosensors, demands high tolerances and quality to guarantee correct functionality of sensors. In this work, optical coherence tomography device was installed at the R2R-line to measure the height and width of the hot embossed microchannel structures at speed of 1m/min. The repeating channel structure on the 10 m long sample web was measured at 1m interval. An algorithm, typically used in wavelength scanning interferometry (WSI), is utilized to recover topography at nanometer scale. The results showed that the R2R hot embossing process was very stable and predictable. If process parameters, for instance pressure at the hot embossing unit was increased, it resulted deeper channels as expected. The OCT, with the WSI algorithm, provides topography of microchannel at nanometer scale being thus an excellent tool for optimization of process parameters and for on-line quality control.

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“…The use of OCT-based quantitative assessment for 3D defect inspection of TSPs has been demonstrated [20,21]. Moreover, numerous studies have employed OCT for inspecting solar cells, glass defects, and in paper manufacturing [17,22,23]. The results of its application have sufficiently confirmed OCT as a promising industrial inspection technique that can accurately localize and characterize various defects on both surface and subsurface of a product sample with ultrahigh resolution, which is considerably higher than the resolution of other existing non-destructive cross-sectional inspection techniques.…”

Section: Introductionmentioning

confidence: 99%

Vision-Inspection-Synchronized Dual Optical Coherence Tomography for High-Resolution Real-Time Multidimensional Defect Tracking in Optical Thin Film Industry

et al. 2020

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Large-scale product inspection is an important aspect in thin film industry to identify defects with a high precision. Although vision line scan camera (VLSC)-based inspection has been frequently implemented, it is limited to surface inspections. Therefore, to overcome the conventional drawbacks, there is a need to extend inspection capabilities to internal structures. Considering that VLSC systems have access to rich information, such as color and texture, high-resolution real-time multimodal optical synchronization between VLSC and dual spectral domain optical coherence tomography (SD-OCT) systems was developed with a laboratory customized in-built automated defect-tracking algorithm for optical thin films (OTFs). Distinguishable differences in the color and texture of the bezel area were precisely determined by the VLSC. Detailed OCT assessments were conducted to verify the detection of previously unobtainable border regions and micrometer-range sub-surface defects. To enhance the accuracy of the method, VLSC images were aided for the precise surface defect identification using OCT and the image acquisition, signal processing, image analysis, and classification of both techniques were simultaneously processed in real-time for industrial applicability. The results demonstrate that the proposed method is capable of detecting and enumerating total number of defects in OTF samples with exceptional resolution and in a cost-effective manner facilitating wide area inspection for OTF samples.

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Optical inspection of solar cells using phase-sensitive optical coherence tomography

Cited by 20 publications

References 26 publications

Simultaneous en-face imaging of multiple layers with multiple reference optical coherence tomography

Simultaneous en-face imaging of multiple layers with multiple reference optical coherence tomography

Wavelength Scanning Interferometry for Topography of Microchannels at Roll-to-Roll Line with Optical Coherence Tomography

Vision-Inspection-Synchronized Dual Optical Coherence Tomography for High-Resolution Real-Time Multidimensional Defect Tracking in Optical Thin Film Industry

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