Optical Imaging Metrology Calibration using High Voltage Scanning Electron Microscope at After-Development Inspection for Advanced Processes

Gutman, Nadav; Tarshish, Inna; Gronheid, Roel; Dror, Chen; Michelsson, Detlef; Backhauss, Henning; Levin, L.; Levinski, Vladimir; Paskover, Yuri; Yerushalmi, Liran; Heidrich, Thomas; Czerkas, Slawomir; Pohlmann, U.; Laske, Frank

doi:10.1117/12.2551797

Metrology, Inspection, and Process Control for Microlithography XXXIV 2020

DOI: 10.1117/12.2551797

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Optical Imaging Metrology Calibration using High Voltage Scanning Electron Microscope at After-Development Inspection for Advanced Processes

Nadav Gutman

Inna Tarshish

Roel Gronheid³

et al.

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Optical Imaging Metrology Calibration using High Voltage Scanning Electron Microscope at After-Development Inspection for Advanced Processes

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