Optical Fiber-Tip Heat Sensor Featuring a Multipositional Fabry–Pérot Cavity Resonator

Williams, Jeremiah C.; Smith, J. Wolfgang; Suelzer, Joseph S.; Usechak, Nicholas G.; Chandrahalim, Hengky

doi:10.1109/sensors47125.2020.9278730

Cited by 5 publications

(4 citation statements)

References 35 publications

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“…Optical fibers with integrated FP sensing elements are reported in the literature with a variety of designs, fabrication processes, and applications. Microscale fiber-optic systems have been demonstrated for sensing pressure, − temperature, ,,,,− ,,− refractive index (RI) and gas, ,,,− magnetic field strength, airflow, − liquid flow vector, humidity, , acoustic pressure, , vibration, and applied force . All of these exciting applications could be improved by utilizing reflective coatings and curved surfaces, as enabled by the dynamically movable hinged mirror feature demonstrated in this work.…”

Section: Introductionmentioning

confidence: 97%

“…2PP nanofabrication offers even greater precision and has been used to demonstrate very challenging 3D features on optical fiber tips with submicron accuracy. Examples include a force-sensitive microgripper, multilens objectives, microring resonators, whispering gallery mode resonators, , an inverse-designed metalens, a microscale anemometer, , a microphone, and FP cavity sensors. ,,,,,,,,,,, This work utilizes 2PP nanofabrication to demonstrate a design solution that enables directional thin-film deposition onto a monolithically integrated spring body optical cavity with dynamic mirrors of arbitrary curvature. Moreover, 2PP nanofabrication is also used to produce a nonresonant microturbine flow sensor on an optical fiber.…”

Section: Introductionmentioning

confidence: 99%

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Multiphoton Nanosculpting of Optical Resonant and Nonresonant Microsensors on Fiber Tips

Williams

Chandrahalim

Suelzer

et al. 2022

ACS Appl. Mater. Interfaces

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This work presents a multiphoton nanosculpting process that is employed to fabricate three-dimensional (3D) mechanically assisted optical resonant and nonresonant microsensors on fiber tips. The resonant microsensor consists of a complex 3D optical cavity design with submicron resolution and advanced micromechanical features including a hinged, multipositional mirror, a 3D spring body to displace this mirror without deforming it, and adhesive-retaining features for sealing the cavity. These features represent a breakthrough in the integration and fabrication capabilities of micro-optomechanical systems. The demonstrated dynamic optical surface enables directional thin-film deposition onto obscured areas. We leverage the rotation of the dynamically movable mirror to deposit a thin reflective coating onto the inner surfaces of a Fabry–Pérot cavity (FPC) with curved geometry. The reflective coating in conjunction with the dynamically rotatable mirror greatly improves the quality factor of the FPC and enables a new class of highly integrated multipurpose sensor systems. A unique spring body FPC on an optical fiber tip is used to demonstrate pressure sensing with a sensitivity of 38 ± 7 pm/kPa over a range of −80 to 345 kPa. The nonresonant microsensor consists of microblades that spin in response to an incident flow. Light exiting the core of the optical fiber is reflected back into the fiber core at a flow-dependent rate as the blades pass by. The fiber tip flow sensor operates successfully over a range of 9–25 LPM using nitrogen gas and achieves a linear response of 706 ± 43 reflections/LPM over a range of 10.9–12 LPM. The nanostructuring technology presented in this work offers a path forward for utilizing 3D design freedom in micromechanically enhanced optical and optofluidic systems to facilitate versatile processing and advantageous geometries beyond the current state-of-the-art.

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Section: Introductionmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

Multiphoton Nanosculpting of Optical Resonant and Nonresonant Microsensors on Fiber Tips

Williams

Chandrahalim

Suelzer

et al. 2022

ACS Appl. Mater. Interfaces

Self Cite

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“…Previous studies have suggested that the beam divergence in optical fiber F-P can be mitigated by replacing the flat mirrors with concave mirrors [8], [9]. This approach is also common in standard F-P resonators, where the radius of curvature must be carefully selected in accordance with the stability criterion for resonance [7]:…”

Section: Introductionmentioning

confidence: 99%

Experimental Investigation of optical fiber Fabry-Perot resonators: resonance enhancement through reflective coatings and concave mirrors

Halendy,

Korec-Kosturek,

Ertman

et al. 2024

Specialty Optical Fibres VIII

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In this study, experimental investigation of fiber-based Fabry-Perot is compared against the theoretical predictions of Fabry-Perot resonators. The special emphasis in this study was placed on testing the perspectives for resonance enhancement by coating the fiber facets by highly reflective surfaces and by replacing the flat surfaces by concave mirrors fabricated by the Two-Photon Polymerization (2PP) 3D nano-printing method. Golden layers of varying thickness were deposited on both flat and concave mirrors of optical fiber Fabry-Perot resonators, which were constructed from simply two optical fiber tips carefully aligned parallel to each other. An improvement of extinction ratio by even 12.5 dB and higher finesse of the resonance signal was registered. The resonance spectra resulting from such modifications were measured and discussed in relation to the assumptions of the theory for free-space Fabry-Perot resonators. It was demonstrated that the most optimal reflectance (R) values of both mirrors for the standard Fabry-Perot cavities (R1 = R2) are not the most optimal in case of fiber Fabry-Perot cavities.

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“…With its first demonstration in the 1990s 28 , 3D direct laser writing (DLW) enabled the fabrication of free-formed three-dimensional polymeric structures with sub-micrometer resolution. It led to the miniaturization of on-chip optical components 29 , waveguides 30 , and mechanical structures 31 including 3D acoustic metamaterials 32 , and has been used for mask applications 18 . Apart from large planar substrates, writing on fiber-ends has been tackled for applications in endoscopy 33 or sensing 34,35 .…”

mentioning

confidence: 99%

Direct Laser-Written Optomechanical Membranes in Fiber Fabry-Perot Cavities

Tenbrake,

Faßbender,

Hofferberth

et al. 2023

2023 Conference on Lasers and Electro-Optics Europe &Amp; European Quantum Electronics Conference (CLEO/Europe-EQEC)

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Optical Fiber-Tip Heat Sensor Featuring a Multipositional Fabry–Pérot Cavity Resonator

Cited by 5 publications

References 35 publications

Multiphoton Nanosculpting of Optical Resonant and Nonresonant Microsensors on Fiber Tips

Multiphoton Nanosculpting of Optical Resonant and Nonresonant Microsensors on Fiber Tips

Experimental Investigation of optical fiber Fabry-Perot resonators: resonance enhancement through reflective coatings and concave mirrors

Direct Laser-Written Optomechanical Membranes in Fiber Fabry-Perot Cavities

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