Optical feedback mechanisms in laser induced growth of carbon nanotube forests

Bock, Maximilian; Denk, Richard; Wirth, Christoph; Oppenheimer, Pola Goldberg; Hofmann, Stephan; Baumberg, Jeremy J.

doi:10.1063/1.3670328

Cited by 8 publications

(15 citation statements)

References 19 publications

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“…76,77 On top of that, transparency of the substrate for certain wavelengths is another property that significantly influences the growth method that can be used. The most commonly used substrate is silicon, although fused silica, [76][77][78] graphite and grafoil, 79 and porous Al 2 O 3 membranes 80,81 were also used in combination with laser-assisted growth. Shi et al 82 synthesized suspended multiwall (650 C) as well as single-wall (770 C) nanotubes on inverse opal templates of silicon covered with a NiFe catalyst.…”

Section: A Catalyst and Substratementioning

confidence: 99%

“…In fact, the laser type and wavelength could influence the resulting growth. Apart from the most commonly used CO 2 lasers, a wide variety of different laser sources have been reported to grow CNT structures, such as Ar-ion lasers, 80,81,91,96 Nd:YAG lasers, 78,92,97 diode lasers, 76,[98][99][100] and Nd:YVO 4 lasers. 77,78,93,94 These reported laser sources all are CW lasers where the beam irradiates the substrate continuously for a certain duration.…”

Section: Laser Sourcementioning

confidence: 99%

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Laser-assisted growth of carbon nanotubes—A review

Burgt

2014

Journal of Laser Applications

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Laser-assisted chemical vapor deposition (LACVD) is an attractive maskless process for growing locally carbon nanotubes at selected places on substrates that may contain temperature-sensitive components. This review gives a comprehensive overview of the reported research with respect to laser assisted CVD for the growth of carbon nanotubes. The advantages and disadvantages of local growth using laser sources are discussed, with a focus on structural quality and properties, such as length, position and alignment, and process control. The paper is divided into two parts. The first part deals with the influence that the main parameters for nanotube growth-gas, catalyst and thermal energyhave on the growth of carbon nanotubes by laser-assisted synthesis. The second part deals with the attempts and successes to control different aspects of local nanotube growth using a laser-assisted growth method. V

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Section: A Catalyst and Substratementioning

confidence: 99%

Section: Laser Sourcementioning

confidence: 99%

Laser-assisted growth of carbon nanotubes—A review

Burgt

2014

Journal of Laser Applications

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“…In 2012, M. C. D. Bock et al reported the growth of multi-walled CNT forests on transparent substrates by laser-induced chemical vapor deposition using iron nanoparticle catalysts and the TEM of the cross-sectional samples of these structures confirmed that the CNTs in the entire structure were multi-layered with an average diameter of 5 nm [279]. Although electrochemical capacitors (EC) charged and discharged faster than batteries, they were still limited by low energy density and slow rate.…”

Section: Carbon Materialsmentioning

confidence: 99%

The Fabrication of Micro/Nano Structures by Laser Machining

Yang

Wei

et al. 2019

Nanomaterials

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Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

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“…Most CNTs synthesized using LCVD are multiwalled [35], and by tailoring laser irradiance, catalyst, and chamber pressures SWCNTs have been achieved [36]- [39]. The effects of laser beam structure [40] and catalyst particles on CNT morphology [41], optical feedback mechanisms [42], and CNT evolution in the early stage [43] have been investigated. These investigations have demonstrated the advantages of LCVD, such as fast CNT growth rates, instant start and stop of synthesis, and minimum substrate and grown CNT damage.…”

Section: Introductionmentioning

confidence: 99%

Localized Synthesis of Carbon Nanotube Films on Suspended Microstructures by Laser-Assisted Chemical Vapor Deposition

Ruan

Wang

2013

IEEE Trans. Nanotechnology

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A laser-assisted chemical vapor deposition (LCVD) method has been developed for in situ synthesis of carbon nanotube (CNT) films on suspended microstructures. Focused laser beams are used to heat locally the suspended microstructures with low thermal mass and low thermal dissipation to high temperatures for localized CNT growth. Other substrate areas than the microstructures remain at low temperatures, preventing the devices on the substrate from being destroyed by high temperatures. The synthesizing parameters and the influences on CNT morphology and structures are systematically investigated and optimized, and solutions for uniform temperature distribution are proposed. Upon optimization, uniform, localized, and rapid growth of CNT synthesis has been achieved on suspended microstructures, and aligned CNTs with length and uniformity comparable to conventional hot-wall CVD have been successfully obtained. The experimental results show LCVD is a promising technology for in situ and localized synthesis of CNT films on suspended microstructures for CNT-CMOS (complementary metal oxide semiconductor) integration.Index Terms-Carbon nanotube (CNT), complementary metal oxide semiconductor (CMOS), integration, laser, microstructure.

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Optical feedback mechanisms in laser induced growth of carbon nanotube forests

Cited by 8 publications

References 19 publications

Laser-assisted growth of carbon nanotubes—A review

Laser-assisted growth of carbon nanotubes—A review

The Fabrication of Micro/Nano Structures by Laser Machining

Localized Synthesis of Carbon Nanotube Films on Suspended Microstructures by Laser-Assisted Chemical Vapor Deposition

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