1979
DOI: 10.1016/0378-5963(79)90042-4
|View full text |Cite
|
Sign up to set email alerts
|

Optical examination and monitoring of surfaces

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
6
0

Year Published

1980
1980
2012
2012

Publication Types

Select...
7
2

Relationship

0
9

Authors

Journals

citations
Cited by 34 publications
(6 citation statements)
references
References 149 publications
0
6
0
Order By: Relevance
“…and Yo measured in two zones according to Eqns (1, 2) for a bare surface in pure buffer solution. Owing to the presence of the oxide layer on silicon, and in the present work a bound methylsilane layer on top of this oxide for the hydrophobic slides, this Ns is a pseudorefractive index representing a composite surface [28]. The error, induced by using a pseudoNs instead of involving the respective refractive indices of the substrate consisting of silicon covered by an approximately 2-nm-thick layer of oxide and eventually methylsilane, was checked by simulations and found negligible compared to the experimental errors.…”
Section: Ellipsometric Methodsmentioning
confidence: 97%
“…and Yo measured in two zones according to Eqns (1, 2) for a bare surface in pure buffer solution. Owing to the presence of the oxide layer on silicon, and in the present work a bound methylsilane layer on top of this oxide for the hydrophobic slides, this Ns is a pseudorefractive index representing a composite surface [28]. The error, induced by using a pseudoNs instead of involving the respective refractive indices of the substrate consisting of silicon covered by an approximately 2-nm-thick layer of oxide and eventually methylsilane, was checked by simulations and found negligible compared to the experimental errors.…”
Section: Ellipsometric Methodsmentioning
confidence: 97%
“…Due to the presence of 1-2 nm thick spontaneously formed hydrated oxide on the silicon, this index will be a pseudo refractive index describing a composite first layer. According to Neal (12), for very thin films (10 nm), i.e. the hydrated oxide, the change in 4> and A due to one overlaying film, i.e.…”
Section: Methodsmentioning
confidence: 99%
“…photoconductivity, surface photoe.m.f., etc. It should be convenient to compare results of such investigations with the results obtained from ellipsometry [9].…”
Section: Theoretical Basis Of the Angular Methods Of Pme Invefitigationmentioning
confidence: 99%