Optical emission spectroscopy of the plasma during sputter deposition of YBCO films for microwave applications

Tsaneva, V.; Nurgaliev, T.; Donchev, T.; Vickers, M. E.; Durrell, John; Purnell, A.; Cohen, L. F.; Barber, Z. H.

doi:10.1109/tasc.2003.812002

Cited by 2 publications

(12 citation statements)

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“…It turns out that this last condition, for the sample analyzed in this work , corresponds to a diffraction angle well above the maximum measured position. Only a monotonous drop in the intensity was observed as a consequence in [6]. However, the recovery in intensity and peak resolution for higher orders was reported in [9], where the difference in lattice constants was 4 times larger .…”

Section: Anomalous Peak Broadening and Weakening Of Intensitymentioning

confidence: 80%

“…Inserting (2) in the above expression, we finally get: (6) The main difference in (6) with respect to (4) is the coefficient affecting the phase factor in the sum. Indeed, while for the pure crystal this factor is a real number , for the random intercalated crystal it is a complex number with its own phase and whose amplitude depends exponentially on the cell index N. These two new ingredients-as we shall see-contribute, respectively, to the order-dependent shifts, and to the anomalous broadening and intensity drop of the Bragg peaks.…”

Section: A General Calculationmentioning

confidence: 99%

“…In order to use (9) to fit the experimental data of [6], we convert the values of the observed peaks to the corresponding values for the wave vector . The values (and by the way, the FWHM) have been determined with Lorentzian fits of the XRD peaks.…”

Section: A Modified Peak Positionsmentioning

confidence: 99%

“…The main goal of most of these early investigations [2], [3] was to modify the electronic properties of the oxide by the electrons of intercalated hydrogen atoms. More recently, hydrogen incorporation during the deposition of Y123 epitaxial films has been used to tune specific characteristics for different applications [4]- [6].…”

Section: Introductionmentioning

confidence: 99%

“…Reference [6] addresses optical emission spectroscopy of the plasma during sputter deposition of Y123 thin films under different conditions, including small trace gas additions to the sputtering gas . The authors report also on observed X-ray diffraction (XRD) anomalies (see Fig.…”

Section: Introductionmentioning

confidence: 99%

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X-Ray Diffraction Anomalies and Random Intercalation in H-Loaded Y-Ba-Cu-O Films

Ariosa¹,

Tsaneva

Barber

2005

IEEE Trans. Appl. Supercond.

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A model has been developed to account for the structural peculiarities observed by X-ray diffraction of hydrogen-loaded Y123 films deposited in an O 2 Ar + H 2 O atmosphere. The model considers the random inter-growth of two very similar structures with slightly different -axis or, equivalently, the random intercalation of a small spacer in the Y123 matrix causing displacement disorder along the -axis direction. It quantitatively reproduces both the nonmonotonous deviations of Bragg-peaks and their progressive weakening and broadening for higher diffraction orders. The model offers the possibility to evaluate both the fraction of secondary phase and its -axis lattice parameter. In the example given, we have been able to identify 28% of intercalated hydrogen bronze H 0 66 [Y123] with 4% elongated -axis. A simplified procedure for the diagnosis and characterization of random intercalates is extracted from the model. Similar structures observed in other perovskite-based layered oxides are discussed within this framework.

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Section: Anomalous Peak Broadening and Weakening Of Intensitymentioning

confidence: 80%

Section: A General Calculationmentioning

confidence: 99%

Section: A Modified Peak Positionsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

X-Ray Diffraction Anomalies and Random Intercalation in H-Loaded Y-Ba-Cu-O Films

Ariosa¹,

Tsaneva

Barber

2005

IEEE Trans. Appl. Supercond.

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Diagnostics of sputtering plasma variations affecting Y–Ba–Cu–O thin film growth and properties

Tsaneva

Vickers

Blamire

et al. 2004

Supercond. Sci. Technol.

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Optical emission spectroscopy and Langmuir probe measurements have been performed under varying conditions, close to those previously optimized for high-pressure on-axis DC sputter deposition of YBa 2 Cu 3 O 7−x (Y123) films. The electron temperature and density of the plasma were mapped between the target and substrate. The aim of the investigation was to discern the effect of small variations of plasma environment on film growth and thus to enable precise tuning of the deposition conditions for Y123 and YBa 2 Cu 4 O 8 (Y124) films for different applications. The input parameters varied were: Ar-to-O 2 ratio in the sputtering gas and small additions of He, H 2 or H 2 O; total pressure; target composition (Y123 or Y124); and deposition temperature T s . The films were characterized by four-point and inductive T c measurements, x-ray diffractometry, Raman spectroscopy, Auger electron spectroscopy, Rutherford back scattering, x-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, and x-ray energy dispersive spectrometry. A model has been developed to account for the structural peculiarities observed in the x-ray diffractograms of hydrogen-loaded Y123 films deposited in O 2 /Ar + H 2 O presented.

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Optical emission spectroscopy of the plasma during sputter deposition of YBCO films for microwave applications

Cited by 2 publications

References 11 publications

X-Ray Diffraction Anomalies and Random Intercalation in H-Loaded Y-Ba-Cu-O Films

X-Ray Diffraction Anomalies and Random Intercalation in H-Loaded Y-Ba-Cu-O Films

Diagnostics of sputtering plasma variations affecting Y–Ba–Cu–O thin film growth and properties

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