Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis

Guan, Yizhao; Masui, Shuzo; Kadoya, Shotaro; Michihata, Masaki; Takahashi, Satoru

doi:10.3850/978-981-18-6021-8_or-15-0084.html

Asian Society for Precision Engineering and Nanotechnology (ASPEN 2022) 2022

DOI: 10.3850/978-981-18-6021-8_or-15-0084.html

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Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis

Yizhao Guan¹,

Shuzo Masui²,

Shotaro Kadoya³

et al.

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2024

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Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing

Sato,

Li,

Michihata

et al. 2024

IJAT

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This paper provides an overview of state-of-the-art sensing and machine learning technologies for intelligent measurement in smart and precision manufacturing. Length, angle, and force are identified as the fundamental quantities for production quality management based on process monitoring as well as geometrical metrology in optical lithography and mechanical machining. Advancements in length-based measurement technologies such as laser interferometers and optical encoders, as well as advancements regarding depth and thickness measurements, are presented. Various types of optical microscopes, such as evanescent field microscopes, structured illumination microscopes, and confocal microscopes, are also described. For angle-based measurement technologies, in addition to the conventional continuous-wave laser autocollimators, the newly developed Fabry–Pérot angle sensor and nonlinear optics angle sensor using an ultrashort pulse laser are presented. Finally, on-machine and in-process force sensing and machining learning techniques for dimensional and machining process monitoring are reviewed.

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Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing

Sato,

Li,

Michihata

et al. 2024

IJAT

View full text Add to dashboard Cite

show abstract

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Optical Depth Measurement for Microgrooves: A Self-interferometry Method based on Near-field Polarization Analysis

Cited by 1 publication

References 6 publications

Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing

Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing

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