For label-free assays employing photonic crystal slabs (PCSs), the sensitivity is one of the most important properties influencing the detection limit. We investigate the bulk sensitivity and the surface sensitivity of 24 different PCSs fabricated by injection molding of PMMA and subsequent sputtering of a Ta 2 O 5 high-index layer. The duty cycle of the linear grating is varied in steps of 0.1 between 0.2 and 0.7. Four different Ta 2 O 5 layer thicknesses (89 nm, 99 nm, 189 nm, 301 nm) are deposited. Both bulk and surface sensitivity are optimal for a Ta 2 O 5 layer thickness of 99 nm. The maximum bulk sensitivity of 138 nm/RIU is achieved for a duty cycle of 0.7, while the maximum surface sensitivity of 47 nm/RIU is obtained for a duty cycle of 0.5. Good agreement between experimental results and finite-difference time-domain (FDTD) simulations is observed. The PCSs sensitivity is linked to the mode intensity distribution. Laing, "Label-free assays on the BIND system," J. Biomol. Screen. 9(6), 481-490 (2004). 9. Y. Nazirizadeh, U. Bog, S. Sekula, T. Mappes, U. Lemmer, and M. Gerken, "Low-cost label-free biosensors using photonic crystals embedded between crossed polarizers," Opt. Express 18(18), 19120-19128 (2010). 10. I. M. White and X. Fan, "On the performance quantification of resonant refractive index sensors," Opt. Express 16(2), 1020-1028 (2008). 11. M. El Beheiry, V. Liu, S. Fan, and O. Levi, "Sensitivity enhancement in photonic crystal slab biosensors," Opt.Express 18(22), 22702-22714 (2010). 12. U. Geyer, J. Hauss, B. Riedel, S. Gleiss, U. Lemmer, and M. Gerken, "Large-scale patterning of indium tin oxide electrodes for guided mode extraction from organic light-emitting diodes," J. Appl. Phys. 104(9), 093111 (2008). 13. L. J. Guo, "Nanoimprint lithography: methods and material requirements," Adv. Mater. 19(4), 495-513 (2007