Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition

Dvořák, Jan; Vohánka, Jiří; Buršíková, Vilma; Ohlídal, Ivan

doi:10.1016/j.heliyon.2024.e27246

Heliyon

2024

DOI: 10.1016/j.heliyon.2024.e27246

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Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition

Jan Dvořák,

Jiří Vohánka,

Vilma Buršíková

et al.

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Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition

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References 62 publications

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