“…In the following years, reflectivity-modulated VCSEL arrays were fabricated using either patterned metal on the (unetched) DBR mirror surface (Catchmark et al, 1996;Monti di Sopra et al, 2000;Morgan et al, 1992Orenstein et al, 1991Orenstein et al, , 1992 or etched features in the DBR mirror (Gourley et al, 1991;Warren et al, 1992). In the work of Orenstein et al (1991Orenstein et al ( , 1992, a substrate-emitting configuration was utilized.…”