Optical beam induced current microscopy at DC and radio frequency

Kao, Fu Jen; Chen, Jian Cheng; Shih, Sheng Chih; Wei, Alan; Huang, Sheng‐Lung; Horng, Tzyy Sheng; Török, Péter

doi:10.1016/s0030-4018(02)01806-0

Cited by 8 publications

(5 citation statements)

References 5 publications

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“…Apart from achieving time‐resolved measurements, use of ultrafast pulses from mode‐locked lasers enables the real‐time measurement of spatially resolved frequency response at exceptionally wide bandwidth in real‐time (Kao, 2004), a technique known as radio frequency (RF) OBIC and demonstrated by Kao et al (Kao et al, 2002) in 2002. The system used Ti:Sapphire laser at 780 nm, which devised higher spatial resolution of 1 μm compared to DC frequency OBIC system.…”

Section: Microscopic Measurements Of Obicmentioning

confidence: 99%

“…In contrast, OBIC is a very simple and easy to use technique that can be conducted with relatively simple instrumentation in open air condition without any sample preparation prior to measurement. Due to such advantages, the OBIC microscopy have re-emerged as a novel technique that provides a non-destructive method for inspecting semiconductor devices in failure analysis, especially for solar cells, light emitting diodes and laser diodes, when compared with EBIC microscopy (Kao et al, 2002;Sheppard, 1989). Presently, OBIC microscopy is one of the most powerful non-destructive techniques capable of providing high resolution three-dimensional mapping of photocurrent response of electronic devices, which can further be used for the analysis of their performance and localize structural/crystallographic defects as well as ESD induced defect sites (Essely et al, 2007;Yang et al, 2010).…”

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confidence: 99%

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An insight into optical beam induced current microscopy: Concepts and applications

Zhuo

Banik

Kao

et al. 2022

Microscopy Res & Technique

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Laser scanning optical beam induced current (OBIC) microscopy has become a powerful and nondestructive alternative to other complicated methods like electron beam induced current (EBIC) microscopy, for high resolution defect analysis of electronic devices. OBIC is based on the generation of electron–hole pairs in the sample due to the raster scanning of a focused laser beam with energy equal or greater than the band gap energy and synchronized detection of resultant current profile with respect to the beam positions. OBIC is particularly suitable to localize defect sites caused by metal–semiconductor interdiffusion or electrostatic discharge (ESD). OBIC signals, thus, are capable of revealing the parameters/factors directly related to the reliability and efficiency of the electronic device under test (DUT). In this review, the basic principles of OBIC microscopy strategies and their notable applications in semiconductor device characterization are elucidated. An overview on the developments of OBIC microscopy is also presented. Specifically, the recent progresses on the following three OBIC measurement strategies have been reviewed, which include continuous laser based single photon OBIC, pulsed laser based single photon OBIC, and multiphoton OBIC microscopy for three‐dimensional mapping of photocurrent response of electronic devices at high spatiotemporal resolution. Challenges and future prospects of OBIC in characterizing complex electronic devices are also discussed. Highlights Characterization of electronic device quality is of paramount importance. Optical beam induced current (OBIC) microscopy offers spatially resolved mapping of local electronic properties. This review presents the principle and notable applications of OBIC microscopy.

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Section: Microscopic Measurements Of Obicmentioning

confidence: 99%

mentioning

confidence: 99%

An insight into optical beam induced current microscopy: Concepts and applications

Zhuo

Banik

Kao

et al. 2022

Microscopy Res & Technique

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“…Based on LBIC, a new technique was developed, RF-OBIC [3]. This techniques is available to measure the spatially resolved frequency response of an optically active electronic material in real-time.…”

Section: Laser Beam Induced Current Technique In Laser Scanning Micromentioning

confidence: 99%

Scanning laser microscopy: From far field to near field

Stanciu¹,

Stoichita²

2009

2009 11th International Conference on Transparent Optical Networks

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The authors present a short review on different microscopy techniques based on laser scanning microscopy. The corresponding wavelengths of the techniques cover the range from between far field (hundred nanometres) and near field (few nanometres). Our investigations started with a hundred nanometers resolution in the case of laser beam induced current technique and go to nanometre resolution in the case of near field investigations. Different techniques which we used are shortly presented.

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“…In this view, it is natural to employ techniques in signal processing to condition and to improve the signals for imaging. For instance, the very short temporal width of ultrafast laser pulses enables generation of very high frequency current on fast photo-detectors [12]. Through these unique capabilities we introduces the novel method of optical beam induced current (OBIC) [13][14][15][16][17] that is used to map the frequency transfer properties of optically active electronic devices.…”

Section: Introductionmentioning

confidence: 99%

“…Through these unique capabilities we introduces the novel method of optical beam induced current (OBIC) [13][14][15][16][17] that is used to map the frequency transfer properties of optically active electronic devices. This technique is based on and is hence termed radio frequency (RF) OBIC [12]. We have demonstrated this novel RF OBIC contrast on a PIN photodiode.…”

Section: Introductionmentioning

confidence: 99%

Laser scanning microscopy as a versatile platform: imaging based on nonlinear and ultrafast effects

Kao

2005

SPIE Proceedings

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The nature of scanning image acquisition greatly facilitates incorporation of various contrast signals for imaging and integration with techniques in signal processing. In this study, we are reporting imaging modalities and techniques based on nonlinear optical and ultrafast effects that are excited by ultrafast laser. Additionally, the use of signal processing electronics allows signal conditioning techniques, such as dithering, lock-in detection,Ö etc, to be employed so that better signal to noise ratio can be resulted and special features in imaging can be emphasized.

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Optical beam induced current microscopy at DC and radio frequency

Cited by 8 publications

References 5 publications

An insight into optical beam induced current microscopy: Concepts and applications

An insight into optical beam induced current microscopy: Concepts and applications

Scanning laser microscopy: From far field to near field

Laser scanning microscopy as a versatile platform: imaging based on nonlinear and ultrafast effects

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