“…The Raman spectrum of zinc-blende GaN/AlN SLs contains only two optical phonons, while the spectrum of wurtzite GaN/AlN SL contains six optical phonon lines, which is a favorable factor for the development of quantitative diagnostic methods. There are a number of works where Raman spectroscopy was used to quantitatively evaluate important structural parameters of short-period GaN/AlN SLs like their period, thickness of the GaN and AlN layers, sign and magnitude of strain in individual layers comprising SLs [ 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ]. However, as far as we know, there are no studies yet on the possibility of estimating the degree of interface diffusion in wurtzite short-period GaN/AlN SLs from the data of Raman spectroscopy.…”