Optical and Structural Properties of a-SiC:H prepared by Hot-wire CVD Technique at Various Gas Flow

Azis, Aniszawati; Rahman, Saidur; Rusop, M.; Subban, Rihanum Yahaya; Kamarulzaman, Norlıda; Wui, Wong Tin

doi:10.1063/1.3377889

AIP Conference Proceedings 2010

DOI: 10.1063/1.3377889

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Optical and Structural Properties of a-SiC:H prepared by Hot-wire CVD Technique at Various Gas Flow

Aniszawati Azis

Saidur Rahman

M. Rusop³

et al.

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Optical and Structural Properties of a-SiC:H prepared by Hot-wire CVD Technique at Various Gas Flow

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References 11 publications

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