1999
DOI: 10.1557/s1092578300002854
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Optical and Structural Properties of Er3+-Doped GaN Grown by MBE

Abstract: We report the morphological and compositional characteristics of Er-doped GaN grown by MBE on Si(111) substrates and their effect on optical properties. The GaN was grown by molecular beam epitaxy using solid sources (for Ga and Er) and a plasma gas source for N 2 . The films emit by photoexcitation in the visible and near infrared wavelengths from the Er atomic levels. The morphology of the GaN:Er films was examined by AFM. Composition was determined by SIMS depth profiling that revealed a large Er concentrat… Show more

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Cited by 5 publications
(7 citation statements)
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References 20 publications
(11 reference statements)
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“…All samples were grown on (0001) sapphire substrates. This is in sharp contrast to the results of Er-doped GaN obtained by MBE or ion-implantation, which exhibit the dominant intra-4f Er 3+ transitions to be from the 2 H 11/2 (537 nm) and 4 S 3/2 (558 nm) to the 4 I 15/2 ground state [12,15]. The Er doped GaN epilayers were grown in a horizontal reactor at 1040 C. A UV photoluminescence (PL) spectroscopy system was employed to study the optical properties of the Er doped GaN.…”
Section: Methodscontrasting
confidence: 99%
See 1 more Smart Citation
“…All samples were grown on (0001) sapphire substrates. This is in sharp contrast to the results of Er-doped GaN obtained by MBE or ion-implantation, which exhibit the dominant intra-4f Er 3+ transitions to be from the 2 H 11/2 (537 nm) and 4 S 3/2 (558 nm) to the 4 I 15/2 ground state [12,15]. The Er doped GaN epilayers were grown in a horizontal reactor at 1040 C. A UV photoluminescence (PL) spectroscopy system was employed to study the optical properties of the Er doped GaN.…”
Section: Methodscontrasting
confidence: 99%
“…Successful incorporation of Er into GaN has been achieved by methods such as ionimplantation, hydride vapor phase epitaxy (HVPE), metal organic molecular beam epitaxy (MOMBE), and molecular beam epitaxy (MBE) [5][6][7][8][9][10][11][12][13][14][15]17]. There have been reports of Er incorporation, leading to devices, such as light emitting diodes (LEDs), that produce wavelengths ranging from the visible to infrared (IR) [6,11,14].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, it is very important to show that both ion implantation and in situ incorporation can achieve high RE concentrations and optical activity in GaN. 24 Birkhahn et al have investigated the in situ incorporation of Er from a solid source into GaN during growth by MBE on sapphire 25 and on Si 26 Substrates. GaN films grown on sapphire were coimplanted with Er and O ions.…”
Section: Rare-earth Dopingmentioning
confidence: 99%
“…(b) Red PL from Pr focused-ion-beam-implanted GaN 25. (a) Green EL from in situ -doped GaN .Er LED. '…”
mentioning
confidence: 99%
“…In the last decade, special attention was given to Er doped IIInitride semiconductors since the thermal quenching of 1.54 m emission intensity is greatly reduced in these materials. 2,9 Different methods have been employed to synthesize Er doped GaN ͑GaN:Er͒, including ion-implantation, 10,11 molecular beam epitaxy, 1,12,13 hydride vapor phase epitaxy, 14 and metal-organic chemical vapor deposition ͑MOCVD͒. 2 In our previous works, [15][16][17] we demonstrated in situ growth of GaN:Er and the related applications of light emitting diodes and erbium doped nitride amplifiers.…”
mentioning
confidence: 99%