OPTICAL AND STRENGTH PROPERTIES OF SACRIFICIAL LAYERS BASED ON POLYIMIDE FILMS

Abstract

Optical and strength properties of films of a polyimide composition (polyimide PI-2610) for creating a sacrificial
 layer deposited on the surface of single-crystal silicon plates of the KDB-10 brand by centrifugation are
 investigated. It has been established that they behave like elastoplastic materials. The true microhardness of polyimide
 PI-2610, measured at a load of 2 g, was ~0,5 GPa. The spectra of the disturbed total internal reflection
 (NPVO) of polyimide PI-2610 were compared with the spectra of the NPVO of pyrrole and kapton polyimide.
 In the spectrum of the polyimide PI-2610, there are bands of vibrations of the 5-membered ring and valence
 vibrations of the C–Nst and CO–Cst groups. The most intense band in the spectrum of NPVO (as in pyrrole) is the band
 of deformation vibrations C-H with a maximum at 734 cm-1. The band at ~1700 cm-1, caused by valence vibrations
 of the C=O double bond, has two closely spaced maxima at 1706 and 1692 cm-1, which indicates two variants
 of the force field around the C=O bond. The presence of hydroxyl O–H groups in the spectra of polyimide
 PI-2610 was detected due to the presence of residual water in the polyimide structure.