2023
DOI: 10.1002/mame.202200617
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Optical and Mechanical Properties of Thin PTFE Films, Deposited from a Gas Phase

Abstract: Thin polytetrafluoroethylene (PTFE) films are produced by deposition from a gas phase by two methods: electron-enhanced vacuum deposition (EVD) and EVD + low-temperature plasma (LTP). Structure, morphology, and composition of the films are studied by IR spectroscopy, atomic force microscopy, and X-ray photoelectron spectroscopy. They are close to the structure of bulk PTFE. The roughness of the films' surface is changed with gas pressure and LTP power variations. Films are transparent from UV to near-infrared … Show more

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Cited by 3 publications
(1 citation statement)
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References 63 publications
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“…Details of the PTFE deposition could be found elsewhere. [42,52,61] The pieces of polycarbonate DVD disk made by OTB Engineering were used. The bare surface of a disc had a regular nanotopography (grooves 180 nm in depth and period of 740 nm).…”
Section: Methodsmentioning
confidence: 99%
“…Details of the PTFE deposition could be found elsewhere. [42,52,61] The pieces of polycarbonate DVD disk made by OTB Engineering were used. The bare surface of a disc had a regular nanotopography (grooves 180 nm in depth and period of 740 nm).…”
Section: Methodsmentioning
confidence: 99%