Optical and electronic properties of CrOxNy films, deposited by reactive DC magnetron sputtering in Ar/N2/O2(N2O) atmospheres

Structural, optical, and electrical properties of WOx(Ny) films deposited by reactive dual magnetron sputtering

“…8). Band gap narrowing by nitrogen incorporation has been previously observed in different transition metal oxynitrides [9,10,12,15,16,38].…”

“…The introduction of oxygen into the tungsten nitride lattice relieves residual stress [15]. Transition metal oxynitrides can be used in numerous applications; for example, CrO x N y can be used for temperature-dependence resistors in thermal radiation detectors [16], TiO x N y can serve as diffusion barriers in silicon-on-sapphire integrated circuits [17] and as decorative coatings [18], HfO x N y can be used as gate material in metal-oxide-semiconductor LBNL-59900 3 devices [19], and rare earth-WO x N y materials are promising as novel pigments [13].…”

First principles treatment of structural, optical, and thermoelectric properties of Li7MnN4 as electrode for a Li secondary battery

“…The promising multifunctional materials include transitional metal oxy-nitrides (TM-O-N). They are technologically important with applications in the fields of biocompatible coatings, solar absorbers, electrochromic coatings, nanocrystalline solar cells, and catalysts [22][23][24][25]. As compared to pure oxides, it has been discovered that TM-O-N compounds (TM = Ta, Hf, Zr, Ti) have improved optical properties [26].…”

Precise control of multilayered structures of Nb–O–N thin films by the use of reactive gas pulsing process in DC magnetron sputtering

“…But there are also several examples where two reactive gases are introduced in the vacuum chamber during deposition, e.g. oxygen and nitrogen for oxynitride coatings (CrON [6], FeON [7], NbON [8,9], SiON [10], TaON [11], TiON [12], WON [13], ZrON [14]) and acetylene (or methane) and nitrogen for carbonitride coatings (TiCN [15], ZrCN [16]). The reactive magnetron sputtering using one or two reactive gases is accompanied by some difficulties, these are: a) poisoning of the target material by contamination with the reactive gas (e.g.…”