In this paper, we study Rota-Baxter operators and super O-operator of associative superalgebras, Lie superalgebras, pre-Lie superalgebras and L-dendriform superalgebras. Then we give some properties of pre-Lie superalgebras constructed from associative superalgebras, Lie superalgebras and L-dendriform superalgebras. Moreover, we provide all Rota-Baxter operators of weight zero on complex pre-Lie superalgebras of dimensions 2 and 3.