Operation of microfabricated harmonic and ordinary side-drive motors

Megregany, M.; Nagarkar, Pradnya; Senturia, S.D.; Lang, Jeffrey H.

doi:10.1109/memsys.1990.110237

Cited by 91 publications

(55 citation statements)

References 3 publications

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“…Since the advent of the first micromotors in the late 1980s [1], [2], various types of actuation mechanisms have been reported for micromachines. Although much work has been dedicated to MEMS reliability [3]- [6], there remains insufficient understanding of friction, wear, and other reliability related phenomena in microelectromechanical devices.…”

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confidence: 99%

Characterization of Dynamic Friction in MEMS-Based Microball Bearings

Lin

Modafe

Shapiro

et al. 2004

IEEE Trans. Instrum. Meas.

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ISR develops, applies and teaches advanced methodologies of design and analysis toAbstract-Rolling element bearing is a well-known concept in macroscale machinery applications. They are prospective candidates for friction reduction in microelectromechanical system (MEMS), as well as for providing stable, robust support for moving micromechanisms. The characteristics of rolling element bearings need to be investigated to facilitate their applications in MEMS. It is well understood that the measured data on the macroscale cannot be directly applied to the microscale. This paper presents an in-situ noncontact experimental system to characterize the friction behavior of microball bearings on the microscale. The methodology presented in this paper provides a useful template to study the dynamical behavior of linear microball bearings with a variety of materials, geometries, and surface qualities. The system, actuated by a motor, affords wide ranges of motion for measuring the dynamic friction using a vision system. It allows the determination of the coefficient of friction (COF) without any interference due to the measurement system. With careful optimization, the error in measurement has been reduced to 2%. Different designs of microball bearings are proposed to achieve lower friction. The studied microball bearings demonstrated an average static COF of 0.01 and an average dynamic COF of 0.007 between stainless-steel and silicon-micromachined contacting surfaces at 27 C and 40% relative humidity.Index Terms-Microelectromechanical systems (MEMS), microball bearings, rolling friction, silicon micromachining, V-grooves.

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confidence: 99%

Characterization of Dynamic Friction in MEMS-Based Microball Bearings

Lin

Modafe

Shapiro

et al. 2004

IEEE Trans. Instrum. Meas.

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“…Finally, it is worth noting that the potential of surface micromachining to fabricate rotary bearings and micromotors was clearly recognized by R. Newcomb, then of Stanford University, after visiting H. C. Nathanson at Westinghouse [5]. He and his group developed a surface micromachining process for a magnetically actuated micromotor [6] that anticipated many features of the polysilicon micromechanisms and electrostatic micromotors reported nearly 20 years later [7][8][9][10].…”

Section: Historical Perspectivementioning

confidence: 99%

Recent Advances in Surface Micromachining

Howe

1996

IEEJ Trans. SM

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Abstract-Surface micromachining is the fabrication of micromechanical structures from deposited thin films. Although the process dates to the 1960s, this paper will survey its rapid extension over the past few years and its application to batch-fabrication of micromechanisms and of monolithic micro electromechanical systems (MEMS). Two central issues in surface micromachining are: (i) the understanding and control of the material properties of microstructural films, such as polycrystalline silicon, and (ii) the release of the microstructure, for example by wet-etching silicon dioxide sacrificial films, followed by the drying and surface passivation of the microstructure. Recent developments in hinged structures for postrelease assembly and high-aspect ratio fabrication of molded parts from deposited thin films promise to extend greatly the capabilities of surface micromachining technology.

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“…On the micro-scale, since the 1980s initial investigations centered on electrostatic micromotors due to the fact that all processes for the fabrication of such devices were available from microelectronics technology [1,2]. At about the same time, on the basis of scale reduction considerations, a number of papers made the case for electrostatic rather than electromagnetic microactuation [3,4].…”

Section: Introductionmentioning

confidence: 99%

Electromagnetic Micromotors—Design, Fabrication and Applications

Büttgenbach

2014

Micromachines

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Abstract:Microactuators have become essential elements of microelectromechanical systems, for example, for positioning purposes and for fluid-handling tasks in microfluidic systems. UV depth lithography and other new micromachining technologies, which have been developed since the 1990s, have initiated extensive investigations of electromagnetic microactuators, which are characterized by high forces, large deflections, low driving voltages resulting from low input impedances and robustness under harsh environments. This paper reviews the comprehensive research on the design, fabrication and application of electromagnetic micromotors performed in our laboratory over the past years.

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Operation of microfabricated harmonic and ordinary side-drive motors

Cited by 91 publications

References 3 publications

Characterization of Dynamic Friction in MEMS-Based Microball Bearings

Characterization of Dynamic Friction in MEMS-Based Microball Bearings

Recent Advances in Surface Micromachining

Electromagnetic Micromotors—Design, Fabrication and Applications

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