Operation modes of the FALCON ion source as a part of the AMS cluster tool

Abstract

Abstract. The paper investigates the options to increase the production yield of temperature compensated surface acoustic wave (SAW) devices with a defi ned range of operational frequencies. The paper focuses on the preparation of large wafers with SiO 2 and AlN/Si 3 N 4 depositions. Stability of the intermediate SiO 2 layer is achieved by combining high power density UV radiation with annealing in high humidity environment. A uniform thickness of the capping AlN layer is achieved by local high-rate etching with a focused ion beam emitted by the FALCON ion source. Operation parameters and limitations of the etching process are discussed.

Novel test-bed facility for PSI issues in fusion reactor conditions on the base of next generation QSPA plasma accelerator

“…Various schemes of steady-state sources are under consideration now. In particular, as the prototype of steady-state source the Hall type plasma thruster, like described in [22,23], is under consideration. Such a source generates hydrogen plasma flows with rather high particle (10 22 m −2 s −1 ) and heat (1.7 MW m −2 ) fluxes allowed to reach a fluence of 10 26 m 2 and even higher [24].…”