2016
DOI: 10.1016/j.snb.2016.01.050
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Online analysis of oxygen inside silicon-glass microreactors with integrated optical sensors

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Cited by 48 publications
(51 citation statements)
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References 38 publications
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“…The synthesis of the oxygen‐sensitive particles as well as their characterization and calibration were described in previous works (Ehgartner, J., Strobl, et al, 2016; Ehgartner, Sulzer, et al, 2016). Oxygen monitoring was carried out at a sampling frequency of 1 Hz using a FireStingO2 optical oxygen meter (Pyroscience, Germany) connected to optical fibers (length 1 m, outer diameter 2.2 mm, fiber diameter 1 mm; Sticker et al, 2019).…”
Section: Methodsmentioning
confidence: 99%
“…The synthesis of the oxygen‐sensitive particles as well as their characterization and calibration were described in previous works (Ehgartner, J., Strobl, et al, 2016; Ehgartner, Sulzer, et al, 2016). Oxygen monitoring was carried out at a sampling frequency of 1 Hz using a FireStingO2 optical oxygen meter (Pyroscience, Germany) connected to optical fibers (length 1 m, outer diameter 2.2 mm, fiber diameter 1 mm; Sticker et al, 2019).…”
Section: Methodsmentioning
confidence: 99%
“…Layers can be structured down to a size of 100 micrometres combination with stencils. 43,44 f. Microdispensing and inkjet printing…”
Section: E Spray-coatingmentioning
confidence: 99%
“…During this method, the glass, which has to be a borosilicate glass with a high content of alkali ions, is exposed to an electric field, causing the surface of the glass to bond with the surface of the silicon wafer. This usually happens at high temperatures >300°C, but has been shown to work at temperatures as low as 180°C by Ehgartner et al 43 which is more likely to leave sensing material in a functional state. With the current state of the art in sensor dye and matrix development, anodic bonding will have to be effective at even lower temperatures to allow sensor integration.…”
Section: A Clampingmentioning
confidence: 99%
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“…Optical chemical sensors are an attractive format for integration into microfluidic devices due to the following features: they are highly sensitive, inexpensive, and easy to miniaturize; and they are capable of noninvasive and nondestructive monitoring during operation (Ehgartner et al, 2016;Gruber, Marques, Sulzer et al, 2017). Several reviews are published on the integration and application of optical sensor in microfluidic devices Pfeiffer & Nagl, 2015;Sun, Ungerböck, & Mayr, 2015).…”
mentioning
confidence: 99%