One-step waveguide endface dicing approach for Silica-on-Silicon PIC chip

Liu, Xu; Zhang, Zhekai; Sun, Xiaohan

doi:10.1364/fio.2018.jtu3a.80

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Frontiers in Optics / Laser Science 2018

DOI: 10.1364/fio.2018.jtu3a.80

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One-step waveguide endface dicing approach for Silica-on-Silicon PIC chip

Xu Liu¹,

Zhekai Zhang²,

Xiaohan Sun³

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One-step waveguide endface dicing approach for Silica-on-Silicon PIC chip

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References 5 publications

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