2008
DOI: 10.1016/j.jcrysgro.2008.04.019
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One-step nano-selective area growth (nano-SAG) of localized InAs/InP quantum dots: First step towards single-photon source applications

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Cited by 11 publications
(7 citation statements)
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“…21 meV [83], 17.5 meV [84]), but currently only at a density of N QD ≈ 10 10 cm −2 . Alternative growth techniques like site-controlled growth [85,86] yield inhomogeneous broadening as low as 4 meV [85], but no QD density is given. Sub-monolayer QD are another promising material system with high gain and low broadening [36].…”
Section: Discussionmentioning
confidence: 99%
“…21 meV [83], 17.5 meV [84]), but currently only at a density of N QD ≈ 10 10 cm −2 . Alternative growth techniques like site-controlled growth [85,86] yield inhomogeneous broadening as low as 4 meV [85], but no QD density is given. Sub-monolayer QD are another promising material system with high gain and low broadening [36].…”
Section: Discussionmentioning
confidence: 99%
“…HSQ is a negative tone resist that is converted to silicon oxide after e-beam exposure making a MOVPE compatible mask directly. This avoids the deposition and etching of an additional glass layer and removing e-beam resist before growth [2]. The small molecular size and high etching resistance is suitable for getting small feature sizes and perform in-situ etching [3].…”
Section: Fabricationmentioning
confidence: 99%
“…Precise positioning of the active material was achieved by means of electron beam lithography with hydrogen silsesquioxane (HSQ) as a mask [9]. Due to its high thermal resistance [10], HSQ is compatible with high-temperature MOVPE growth. The conversion of the resist into silica after exposure helps avoiding critical fabrication steps such as silicon dioxide/nitride deposition and reactive ion etching (RIE) which may introduce defects.…”
Section: Introductionmentioning
confidence: 99%