Abstract:One‐step formation of silicon nanowires, sheets, and texture surface on a silicon substrate has been achieved using hydrogen‐radical etching reactions. Metallic tungsten and for comparison purposes a tungsten hot wire, were used as catalysts for the hydrogen‐molecular cracking. It was shown that a variety of surface structures on silicon such as inverted pyramid texture, V‐groove texture, dense silicon nanowire growth over texture, and nanosheet structure can be obtained by controlling the process conditions. … Show more
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