2022
DOI: 10.1016/j.snb.2022.131578
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One-step fabrication of high-density Si nanotips as SALDI-MS substrate for highly sensitive detection

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Cited by 3 publications
(3 citation statements)
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“…The TSi substrate was prepared by mask-less reactive ion etching. 20 The cleaned silicon slide was directly controlled using a Plasmalab Oxfold 80 plus (ICP65) system (Oxford Instrument Co., UK) with the parameters as follows: the gas flows of SF 6 /CHF 3 /O 2 were 40/10/40 sccm/sccm/sccm; the set pressure was 30 mTorr; the radio frequency power was 100 W. After the etching process, the sample was immersed in 0.04 vol% HF for 20 min to remove the oxide layer on the silicon surface. Finally, the TSi substrate was taken out of the Paper PCCP solution, rinsed with deionized water, and subjected to N 2 purging.…”
Section: Fabrication Of the Tsi Substratementioning
confidence: 99%
“…The TSi substrate was prepared by mask-less reactive ion etching. 20 The cleaned silicon slide was directly controlled using a Plasmalab Oxfold 80 plus (ICP65) system (Oxford Instrument Co., UK) with the parameters as follows: the gas flows of SF 6 /CHF 3 /O 2 were 40/10/40 sccm/sccm/sccm; the set pressure was 30 mTorr; the radio frequency power was 100 W. After the etching process, the sample was immersed in 0.04 vol% HF for 20 min to remove the oxide layer on the silicon surface. Finally, the TSi substrate was taken out of the Paper PCCP solution, rinsed with deionized water, and subjected to N 2 purging.…”
Section: Fabrication Of the Tsi Substratementioning
confidence: 99%
“…As alternatives to traditional matrixes, researchers have proposed metal/metal oxide-based ( Sakurai et al., 2018 ; Sagandykova et al., 2022 ), carbon-based ( Xu et al., 2021 ), and silicon-based ( Dou et al., 2022 ) matrixes. Metal particles with nanoscale diameters are of interest due to their unique plasmon absorption in the visible region, in which gold nanoparticles (Au NP) and silver nanoparticles (Ag NP) are the often utilized metal matrixes.…”
Section: Introductionmentioning
confidence: 99%
“…Over the last few years, many different types of surfaces have been developed for use in SALDI MS. These surfaces were developed based on nanoparticles of metals [14], metal oxides [15], carbon [3] and silicon [16].…”
Section: Introductionmentioning
confidence: 99%