2014
DOI: 10.3390/mi5020228
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One-Step Combined-Nanolithography-and-Photolithography for a 2D Photonic Crystal TM Polarizer

Abstract: Photonic crystals have been widely investigated since they have great potential to manipulate the flow of light in an ultra-compact-scale and enable numerous innovative applications. 2D slab photonic crystals for the telecommunication C band at around 1550 nm have multi-scale structures that are typically micron-scale waveguides and deep sub-micron-scale air hole arrays. Several steps of nanolithography and photolithography are usually used for the fabrication of multi-scale photonic crystals. In this work, we… Show more

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Cited by 9 publications
(3 citation statements)
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“…EBL allows the creation of arbitrary patterns and complex geometries [66]. It offers the freedom to design and fabricate structures that are not achievable with other lithography techniques, providing greater flexibility for research and development [67,68].…”
Section: Electron Beam Lithography (Ebl)mentioning
confidence: 99%
“…EBL allows the creation of arbitrary patterns and complex geometries [66]. It offers the freedom to design and fabricate structures that are not achievable with other lithography techniques, providing greater flexibility for research and development [67,68].…”
Section: Electron Beam Lithography (Ebl)mentioning
confidence: 99%
“…The TE and TM band diagrams of the proposed structure are shown in Figure 4, respectively. There are several polarization devices presented by the researcher that are based on photonic crystals [33][34][35][36][37][38][39][40]. In [41], Kang et al show that by tuning the relative phase of multiple inputs for coherent control, it is possible to attain coherent complete polarization conversion.…”
Section: Phc-based Polarization Maintaining Wgsmentioning
confidence: 99%
“…The PhC can be fabricated using different methods such as electron beam lithography [86], photolithography [87], holography [88] and direct laser writing [89]. For long time 1D structures were fabricated using vapor deposition technique.…”
Section: Fabrication Techniques Of Phcmentioning
confidence: 99%