“…In the high‐resolution scans (Figure S7, Supporting Information), the C 1s band can be deconvoluted into six peaks at 283.5, 284.6, 285.4, 286.4, 287.2, and 288.7 eV, corresponding to CSi, CC, CN, CO, CO, and OCO, respectively . The N 1s band contains three peaks at 398.8, 399.7, and 400.9 eV, representing NSi, CNC, and NH, respectively . The Si 2p band can be deconvoluted into three peaks at 100.7, 101.8, and 102.6 eV for SiC, SiN, and SiO, respectively .…”