One novel type of miniaturization FBG rotation angle sensor with high measurement precision and temperature self-compensation

Abstract

Abstract:In order to achieve rotation angle measurement, one novel type of miniaturization fiber Bragg grating (FBG) rotation angle sensor with high measurement precision and temperature self-compensation is proposed and studied in this paper. The FBG rotation angle sensor mainly contains two core sensitivity elements (FBG1 and FBG2), triangular cantilever beam, and rotation angle transfer element. In theory, the proposed sensor can achieve temperature self-compensation by complementation of the two core sensitivity elements (FBG1 and FBG2), and it has a boundless angel measurement range with 2π rad period duo to the function of the rotation angle transfer element. Based on introducing the joint working processes, the theory calculation model of the FBG rotation angel sensor is established, and the calibration experiment on one prototype is also carried out to obtain its measurement performance. After experimental data analyses, the measurement precision of the FBG rotation angle sensor prototype is 0.2 ˚ with excellent linearity, and the temperature sensitivities of FBG1 and FBG2 are 10 pm/℃ and 10.1 pm/℃, correspondingly. All these experimental results confirm that the FBG rotation angle sensor can achieve large-range angle measurement with high precision and temperature self-compensation.

Fiber-Optic Microstructure Sensors: A Review

“…Among manifold fiber-optic sensors, the fiber-optic microstructure (FOM) sensor, formed by introducing microstructure into optical fiber, is one of the most important devices since it offers unique characteristics of high sensitivity, high resolution, and excellent distributing and multiplexing capabilities. To date, the FOM sensors mainly include fiber Bragg grating (FBG) sensors [1,2], long-period fiber grating (LPFG) sensors [3,4], Fabry-Perot interferometer (FPI) sensors [5,6], Mach-Zehnder interferometer (MZI) sensors [7,8], Michelson interferometer (MI) sensors [9,10], and Sagnac interferometer (SI) sensors [11,12]. Each FOM sensor possesses abundant structures and its fabrication technologies are also various, including chemical etching [13], excimer laser micromachining [14], femtosecond laser micromachining [15], CO 2 laser micromachining [16], focused ion beams (FIB) milling [17], and kinds of coating technologies, just to name a few.…”