One Bulk Micromachined Single-Chip Inertial Measurement Unit

Abstract

This paper presented one single chip micro inertial measurement unit based on ordinary bulk micromachining process. The sample chip integrated six inertial sensors, i.e. the x-axis, y-axis and z-axis accelerometers and gyroscopes, on one area which was smaller than nine square millimeters on the silicon wafer. The test results showed that the bias stability of these gyroscopes was at least better than 3753 degree per hour and the sensitivity was bigger than 2.7 millivolt per deg/sec. And the minimal mechanical sensitivity of the accelerometers was about 19.1 millivolt per gravity acceleration. The experiments prove the feasibility of the simple integration method, which could greatly reduce the size of inertial measurement unit.I.