“…33 We have not verified by in situ infrared absorption measurements whether an oxide layer forms during photoelectrochemical etching as employed in this study, corresponding to the electropolishing regime above the critical current density in anodic etching. However, since a por-Si layer forms, which we have confirmed by scanning electron microscopy, 34,35 photoluminescence, 35,36 profilometry, 22 and porosity measurements, 37 the reaction we observe is within the porous silicon formation regime rather than the electropolishing regime. Moreover, we have previously shown 22 that Gaussian laser intensity profiles lead to Gaussian film profiles.…”