2003
DOI: 10.1088/1009-0630/5/6/005
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On the Plasma-Chemical Synthesis of Nanopowders

Abstract: This paper presents an overview of nanopowders preparation using low-temperature plasma (LTP). LTP with its unique processing capabilities provides an attractive and chemically unspecific route for powder synthesis. Nanopowders such as oxides, nitrides, carbides, catalysts and other nanopowders have been successfully synthesized in LTP reactors based on high intensity arcs, plasma jets and radio-frequency (r. f.) inductively coupled discharges.

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Cited by 29 publications
(9 citation statements)
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“…Nanopowders ZrO 2 and ZrO 2 doped with 4 wt% Y 2 O 3 were obtained by a plasma-chemical method [7]. The typical size of nanoparticles was 10-30 nm.…”
Section: Methodsmentioning
confidence: 99%
“…Nanopowders ZrO 2 and ZrO 2 doped with 4 wt% Y 2 O 3 were obtained by a plasma-chemical method [7]. The typical size of nanoparticles was 10-30 nm.…”
Section: Methodsmentioning
confidence: 99%
“…There are two synthetic methods for the formation of metal nitrides: (i) the physical method and (ii) the chemical method (Giordano and Antonietti, 2011). The physical method includes physical vapor deposition (Andrievski, 1997), plasma, and laser methods (Vissokov et al, 2003;Schaaf et al, 2005). These methods are used for the synthesis of a few products, such as TiN and CrN.…”
Section: Synthesis Of Metal Nitridesmentioning
confidence: 99%
“…In general, TMNs have been prepared using two methods . The first is physical and includes magnetron sputtering, atomic layer deposition, low-temperature plasma, and laser nitridation. , These approaches are often limited by low synthetic outputs. The second method is chemical and uses reactions between appropriate metal precursors, such as metal oxides, with nitrogen sources, such as NH 3 . The chemical reactions are often conducted at high temperatures or under high pressure.…”
Section: Introductionmentioning
confidence: 99%