2018
DOI: 10.1016/j.promfg.2018.10.125
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On the Physical Vapour Deposition (PVD): Evolution of Magnetron Sputtering Processes for Industrial Applications

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Cited by 130 publications
(66 citation statements)
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“…The PVD process, when compared to CVD, runs at a lower temperature (under 500 • C), and is more environmentally safe due to the type of materials that CVD uses. Additionally, the PVD process is more energy efficient when compared to CVD [14][15][16][17]. When selecting the type of coating desired for a tool, the machining process that is being implemented must be taken into consideration.…”
mentioning
confidence: 99%
“…The PVD process, when compared to CVD, runs at a lower temperature (under 500 • C), and is more environmentally safe due to the type of materials that CVD uses. Additionally, the PVD process is more energy efficient when compared to CVD [14][15][16][17]. When selecting the type of coating desired for a tool, the machining process that is being implemented must be taken into consideration.…”
mentioning
confidence: 99%
“…One of the most widely used oxide coatings is the Al 2 O 3 . Other somewhat common coatings for cutting tools are DLC, MoS 2 and WC-C [13,15].…”
Section: Coatings For Turning Toolsmentioning
confidence: 99%
“…Distinguished from the principle of deposition, physical vapor deposition techniques can be divided into vacuum evaporation, sputtering, arc vapor deposition and ion plating. Although these methods differ greatly in specific technical measures, their deposition principles can be divided into three stages: (1) the emission of evaporation sources; (2) the transportation of vapor through vacuum space; (3) the deposition of vapor on the surface of substrates or parts [14]. Figure 2 is a schematic diagram of PVD (a) sputtering and (b) evaporating coating methods.…”
Section: Principles and Characteristics Of Physical Vapor Depositionmentioning
confidence: 99%