On the Modelling of Clamped Plates Loaded by a Squeeze Fluid Film: Application to Miniaturised Sensors

Suu, Thierry Le Van; Durand, Stéphane; Bruneau, Michel

doi:10.3813/aaa.918351

Cited by 13 publications

(14 citation statements)

References 7 publications

(9 reference statements)

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“…2. The incident pressure is set to 1 Pa; the dimensions and other parameters of the transducer which correspond to MEMS microphone 4,5,15,16 are given in Table II. The volume, V c , and the thickness, h c , of the cavity determine the radius of the electrode, R e ¼ 1.09 mm.…”

Section: Resultsmentioning

confidence: 99%

“…The analytical method relies on eigenmodes expansions of both the membrane and the fluidfilled elements loading the membrane (air gap and peripheral cavities), along with general solutions of the associated homogeneous propagation equations (see, for example, Refs. 1,[4][5][6][7][8]. The analytical approach used to provide the results given in this paper has been validated previously from comparison with experimental results obtained on similar transducers available in the literature.…”

Section: Introductionmentioning

confidence: 87%

“…The analytical approach used to provide the results given in this paper has been validated previously from comparison with experimental results obtained on similar transducers available in the literature. 5,7 Regarding the numerical method which could be given also for final designs of devices, numerical simulation using an adaptive mesh and accounting for the viscous and thermal boundary layer effects 9-11 has been handled herein; particularly here, it provides more results against which the approximate analytical results can be tested.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Analytical and numerical modeling of an axisymmetrical electrostatic transducer with interior geometrical discontinuity

Honzík¹,

Podkovskiy²,

Durand³

et al. 2013

The Journal of the Acoustical Society of America

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The main purpose of the paper is to contribute at presenting an analytical and a numerical modeling which would be relevant for interpreting the couplings between a circular membrane, a peripheral cavity having the same external radius as the membrane, and a thin air gap (with a geometrical discontinuity between them), and then to characterize small scale electrostatic receivers and to propose procedures that could be suitable for fitting adjustable parameters to achieve optimal behavior in terms of sensitivity and bandwidth expected. Therefore, comparison between these theoretical methods and characterization of several shapes is dealt with, which show that the models would be appropriate to address the design of such transducers.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 87%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Analytical and numerical modeling of an axisymmetrical electrostatic transducer with interior geometrical discontinuity

Honzík¹,

Podkovskiy²,

Durand³

et al. 2013

The Journal of the Acoustical Society of America

Self Cite

View full text Add to dashboard Cite

show abstract

“…Being inspired by an analogous device described previously [1,2], this kind of receiver can lead to improving the parameters such as sensitivity, bandwidth and the compactness of the device.…”

Section: Introductionmentioning

confidence: 99%

Miniaturized electrostatic receiver with small-sized backing electrode

Podkovskiy¹,

Honzík²,

Durand³

et al. 2013

Proceedings of Meetings on Acoustics

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A miniaturized electrostatic receiver design, having a central cylindrical backing electrode of small radius surrounded by a flat annular cavity behind the circular membrane, can lead to both a higher sensitivity and a larger frequency bandwidth compared to the ones achieved with other designs, while bringing a geometrical simplicity which is advantageous from the point of view of microfabrication. An appropriate computational method, relying on a specific 2-D axisymmetrical simulation using an adaptive mesh and accounting for both viscous and thermal boundary layer effects, provides results against which analytical results can be tested. An analytical approach, which leads to solutions based on the eigenmode expansion of the membrane displacement, the acoustic pressure field depending on the radial coordinate in the central fluid gap but being assumed quasi-uniform in the annular cavity, is much faster in terms of running time and appears to be sufficiently accurate to achieve final optimization of this kind of devices.

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“…Analytical solutions to the Kirchhoff equations in viscothermal fluids [2] presenting a good agreement with experimental results have already been suggested. However, the solutions were found for acoustic devices with simpler shapes [3] or higher dimensions [4]. Regarding the complex shape, small dimensions and strong fluid/structure couplings in this microphone, numerical modeling procedure has to precisely define all the phenomena in the microphone.…”

Section: Introductionmentioning

confidence: 99%

New planar nano-gauge detection microphone: Analytical and numerical acoustic modeling

Guianvarc'H

Verdot

Czarny

et al. 2013

The Journal of the Acoustical Society of America

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The miniaturization of microphones is of great interest for several fields, such as medical applications (audio implants), or consumer electronics (cell phones). Almost all existing miniature microphones rely on electrostatic transduction and offer good performances (sensitivity, frequency bandwidth). However, their sensitivity, proportional to the membranes area, would be dramatically reduced in case of extreme miniaturization. A new concept of microphones developed by CEA-LETI, which uses membranes moving in the plane of the substrate and inducing strain on piezoresistive Si nano-gauges (M&NEMS technology), seems promising for its miniaturization potential without significant decrease of sensitivity. The design and optimization of such planar piezo-resistive microphone require a deep understanding of its acoustic and vibroacoustic behavior. Regarding the small dimensions of the slits (1–100µm) and the sharp discontinuities in the microphones structure, viscous and thermal effects in the boundary layers and turbulent perturbations are of great importance, and must then be taken into account with high accuracy in device modeling. The aim of the present work is to provide accurate analytical and numerical (FEM) models able to gather all these effects in a consistent manner, and to suggest an experimental method to check their validity.

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On the Modelling of Clamped Plates Loaded by a Squeeze Fluid Film: Application to Miniaturised Sensors

Cited by 13 publications

References 7 publications

Analytical and numerical modeling of an axisymmetrical electrostatic transducer with interior geometrical discontinuity

Analytical and numerical modeling of an axisymmetrical electrostatic transducer with interior geometrical discontinuity

Miniaturized electrostatic receiver with small-sized backing electrode

New planar nano-gauge detection microphone: Analytical and numerical acoustic modeling

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