1988
DOI: 10.1016/0022-3093(88)90344-4
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On the mechanism of interaction between TiCl4 vapour and surface OH groups of amorphous SiO2

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Cited by 37 publications
(18 citation statements)
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“…However, comparison of the results of syntheses performed at the same T 0 by different authors shows that the values of n widely vary. In the case of silicas thermally treated at moderate temperatures (180 3 300oC), the Cl/Ti ratio in the products synthesized varied between different studies from 0.5 to 2.6 [6]. Such strong discrepancies may occur for several reasons.…”
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confidence: 70%
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“…However, comparison of the results of syntheses performed at the same T 0 by different authors shows that the values of n widely vary. In the case of silicas thermally treated at moderate temperatures (180 3 300oC), the Cl/Ti ratio in the products synthesized varied between different studies from 0.5 to 2.6 [6]. Such strong discrepancies may occur for several reasons.…”
mentioning
confidence: 70%
“…The functionality of titanium oxochloride surface structures formed in TiCl 4 chemisorption largely depends on the initial concentration of silanol groups, which is determined by the temperature T 0 of preliminary annealing of silica [2]. A review of the available experimental data on the influence exerted by T 0 on the nature of TiCl 4 chemisorption makes it possible to reveal the general pattern consisting in that the Cl/Ti ratio in surface groups increases from 1 to 3 as the concentration of =Si3OH decreases (with increasing T 0 ) [2,6]. However, comparison of the results of syntheses performed at the same T 0 by different authors shows that the values of n widely vary.…”
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confidence: 98%
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“…Thus, the state-of-the-art production of SiO 2 at RT using a constant ow of NH 3 has been compared to pulse NH 3 -catalysed RT-ALD. Inspired by the reactivity of chlorinated precursors described by Damyanov et al, 49 the amount of contamination could be cautiously explained by the functionality x of the adsorbed species at the surface explained hereaer:…”
Section: Contaminant Inclusion Mechanismmentioning
confidence: 99%
“…According to Damyanov et a1. 6 and Zyskowski and Skupinski,7 titanium bound to silica in the +4 oxidation state can be released without decomposing the silica. Damyanov et al dissolved titanium/silica samples prepared in the gas phase with TiCI4 in 1 mol dm-3 sulfuric acid before determining the titanium by atomic absorption spectrometry (AAS) .…”
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confidence: 99%