2014
DOI: 10.1016/j.vacuum.2014.07.015
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On the hydrogenated silicon carbide (SiCx:H) interlayer properties prompting adhesion of hydrogenated amorphous carbon (a-C:H) deposited on steel

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Cited by 26 publications
(21 citation statements)
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“…Moreover, the oxygen signal remains higher for shorter times at higher SiC x :H deposition temperature due to the buf fer layer thickness decreasing with the increasing of the deposition temperature. 15 It is important to stress that the indepth oxygen profile in the ferrous alloy region does not appreciably change at different deposition temperatures, which suggests that oxygen does not diffuse into the bulk material and may be desorbed from the film structure during the growth process at higher deposition temperatures. Consequently, the higher the deposition temperature, the higher the oxygen mobility on the surface, leading to the desorption of oxygen species.…”
Section: Resultsmentioning
confidence: 99%
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“…Moreover, the oxygen signal remains higher for shorter times at higher SiC x :H deposition temperature due to the buf fer layer thickness decreasing with the increasing of the deposition temperature. 15 It is important to stress that the indepth oxygen profile in the ferrous alloy region does not appreciably change at different deposition temperatures, which suggests that oxygen does not diffuse into the bulk material and may be desorbed from the film structure during the growth process at higher deposition temperatures. Consequently, the higher the deposition temperature, the higher the oxygen mobility on the surface, leading to the desorption of oxygen species.…”
Section: Resultsmentioning
confidence: 99%
“…Complementary information about the deposition system is described elsewhere. 15,19 Only thin layers were grown on the ferrous alloy in order to probe interfaces of interest by the XPS, due to the fact that this technique, as it is well known, can analyze the outermost atomic layers up to ∼0.5− 2 nm in-depth for the energy of the X-ray used in the experiments. 20 The chemical composition and bonding of the interfaces were determined by XPS equipment model Thermo Alpha 110 Hemispherical Analyzer using the 1486.6 eV photons from an Al target (K α line).…”
Section: Methodsmentioning
confidence: 99%
“…Furthermore, the exponential decay (at T ≥100°C) of the interlayer thickness as a function of temperature, by using HMDSO as silicon precursor, is quite similar to those obtained by using TMS as silicon precursor. 20 The DLC deposition parameters were maintained constant for all the produced samples. Figure 4a shows the Raman spectra for the DLC films deposited at different temperatures of the SiC x :H interlayer deposition.…”
Section: Resultsmentioning
confidence: 99%
“…One can remark that even the highest hardness value is lower than those published in previous works due to the base roughing pressure of 2 Pa. This base pressure was intentionally used in order to explore the limitation of this technique in the hardness of a-C:H thin films and a recent publication from our group showed the chemical analysis of a-C:H thin films obtained under the same deposition conditions [32]. Moreover, these relatively low hardness values can be explained, partially, by the relatively high hydrogen content in our a-C:H thin films [10].…”
Section: Resultsmentioning
confidence: 99%