On the formation mechanisms of the diffuse atmospheric pressure dielectric barrier discharge in CVD processes of thin silica-like films

Starostin, Sergey A.; Premkumar, Peter Antony; Creatore, M.; Veldhuizen, E.M. van; Vries, Hindrik de; Paffen, Roger M. J.; Sanden, M.C.M. van de

doi:10.1088/0963-0252/18/4/045021

Cited by 62 publications

(75 citation statements)

References 28 publications

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“…Alternatively, stability is achieved by coating at least one electrode with an insulating layer and applying an AC potential. Once the discharge is initiated, surface charging of the insulator limits the electric field inside the plasma, extinguishing the ionization rate within a microsecond or less [24][25][26][27][28] The duration of the discharge is less than the IOI time constant. The dielectric barrier discharge (DBD) is quite widely used due to this simple and effective stabilization of the IOI.…”

Section: Introductionmentioning

confidence: 99%

Instability control in microwave-frequency microplasma

Miura

Hopwood

2012

Eur. Phys. J. D

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Abstract. Atmospheric argon microplasmas driven by 1.0 GHz power were studied by microwave circuit analyses and spatially-resolved optical diagnostics. These studies illuminate the mechanisms responsible for microplasma stability. A split-ring resonator (SRR) microplasma source is demonstrated to reflect excess microwave power, preventing the ionization overheating instability while limiting electron density to approximately 1 × 10 14 cm −3 and OH rotational temperature to 760 K at 0.76 W. Providing the SRR microplasma with an electrical path to ground, however, allows the microplasma to transition from the SRR mode to the so-called transmission line mode (T-line). This transition is due to matching of the microplasma and transmission line impedances. The higher power T-line mode supports a more intense microplasma with electron density of 1 × 10 15 cm −3 and OH rotational temperature of 1480 K with 15 W absorbed power. While the SRR mode is optimized for ignition and sustaining a stable nonequilibrium plasma, and T-line mode is better suited for driving a hot, high density microplasma. The estimated microwave discharge voltages were 15 V and 35 V in SRR mode and T-line mode, respectively, and the voltages are rather independent of input power. Microplasma stability is due to a combination of impedance mismatching and direct control of power, both inherent to microwave circuitry.

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Section: Introductionmentioning

confidence: 99%

Instability control in microwave-frequency microplasma

Miura

Hopwood

2012

Eur. Phys. J. D

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“…The emission intensity therefore indicate the information of the high-energy electrons in the tail of the EEDF (13.5 eV and 13.3 eV in this study). From figure 5, the LF discharge (P LF = 120 W) can be characterized as operating in 'glow-like' mode with maximal emission intensity close to the electrodes, as previously studied in [11] using nitrogen/oxygen gas mixtures. The RF discharge mode depends on the amplitude of the input power.…”

Section: Time-integrated Plasma Emissionmentioning

confidence: 60%

“…The characteristic transverse excitation intensity profiles corresponding to phase (1) and (2) in figure 6 are presented in figure 7. As previously studied by Starostin et al for similar conditions in an N 2 /O 2 gas mixture, the LF discharge is initiated by the Townsend breakdown mechanism [11]. The space charge produced from the preceding half cycle would affect the electric field and reduce the breakdown voltage at the ignition of the next discharge.…”

Section: Phase-resolved Electron Impact Excitationmentioning

confidence: 83%

“…The properties of an atmospheric-pressure high-current diffuse DBD operating at 200 kHz frequency in low cost N 2 /O 2 / Ar gas mixtures were investigated in [11][12][13][14]. According to the fast imaging analysis, during the single current pulse, this transient discharge evolved from a 'Townsend-like' mode to a 'glow-like' mode for each half cycle of the electric field [11,12].…”

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confidence: 99%

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Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O₂gas mixture using 200 kHz/13.56 MHz dual frequency excitation

Liu

Starostin²,

Peeters

et al. 2018

J. Phys. D: Appl. Phys.

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IntroductionDevelopment of a large linear or volumetric source of diffuse non-thermal plasma at atmospheric pressure remains to be an essential challenge both from a scientific and a technological point of view. Such a source is required in various applications including plasma-assisted gas phase chemical conversion, surface modification and synthesis of high quality functional thin films [1][2][3][4]. The emerging atmospheric-pressure plasma enhanced chemical vapour deposition (AP-PECVD) technology can potentially achieve a considerable cost efficiency in comparison to the common low-pressure plasma methods, by the possibility of in-line production and by avoiding expensive large-footprint vacuum equipment [5]. One of the common ways to create a large area non-thermal plasma at atmospheric pressure is the dielectric barrier discharge (DBD) AbstractAtmospheric-pressure diffuse dielectric barrier discharges (DBDs) were obtained in Ar/O 2 gas mixture using dual-frequency (DF) excitation at 200 kHz low frequency (LF) and 13.56 MHz radio frequency (RF). The excitation dynamics and the plasma generation mechanism were studied by means of electrical characterization and phase resolved optical emission spectroscopy (PROES). The DF excitation results in a time-varying electric field which is determined by the total LF and RF gas voltage and the spatial ion distribution which only responds to the LF component. By tuning the amplitude ratio of the superimposed LF and RF signals, the effect of each frequency component on the DF discharge mechanism was analysed. The LF excitation results in a transient plasma with the formation of an electrode sheath and therefore a pronounced excitation near the substrate. The RF oscillation allows the electron trapping in the gas gap and helps to improve the plasma uniformity by contributing to the pre-ionization and by controlling the discharge development. The possibility of temporally modifying the electric field and thus the plasma generation mechanism in the DF discharge exhibits potential applications in plasma-assisted surface processing and plasma-assisted gas phase chemical conversion.

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“…In this study, the gas loss is estimated at about 30%. 25 In the deposition, the tetraethylorthosilicate (TEOS) precursor was diluted with 1.0 slm argon together with oxygen as the oxidizer and 15 slm nitrogen as the carrier gas. The DBD was powered by a sinusoidal voltage with a frequency of 185 kHz and amplitude up to 2-3 kV.…”

Section: Experimental Set-upmentioning

confidence: 99%

Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge

Liu

Welzel

Starostin³

et al. 2017

Journal of Applied Physics

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Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers) Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ? Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge A roll-to-roll high-current diffuse dielectric barrier discharge at atmospheric pressure was operated in air and Ar/N 2 /O 2 gas mixtures. The exhaust gas from the discharge was studied using a highresolution Fourier-transform infrared spectrometer in the range from 3000 to 750 cm À1 to unravel the plasma-polymer interactions. The absorption features of H x N y O z , CO x , and HCOOH (formic acid) were identified, and the relative densities were deduced by fitting the absorption bands of the detected molecules. Strong interactions between plasma and polymer (Polyethylene-2,6-naphthalate, or PEN) in precursor-free oxygen-containing gas mixtures were observed as evidenced by a high CO x production. The presence of HCOOH in the gas effluent, formed through plasmachemical synthesis of CO x , turns out to be a sensitive indicator for etching. By adding tetraethylorthosilicate precursor in the plasma, dramatic changes in the CO x production were measured, and two distinct deposition regimes were identified. At high precursor flows, a good agreement with the precursor combustion and the CO x production was observed, whereas at low precursor flows an etching-deposition regime transpires, and the CO x production is dominated by polymer etching. Published by AIP Publishing. [http://dx

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On the formation mechanisms of the diffuse atmospheric pressure dielectric barrier discharge in CVD processes of thin silica-like films

Cited by 62 publications

References 28 publications

Instability control in microwave-frequency microplasma

Instability control in microwave-frequency microplasma

Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O₂gas mixture using 200 kHz/13.56 MHz dual frequency excitation

Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge

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On the formation mechanisms of the diffuse atmospheric pressure dielectric barrier discharge in CVD processes of thin silica-like films

Cited by 62 publications

References 28 publications

Instability control in microwave-frequency microplasma

Instability control in microwave-frequency microplasma

Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O2gas mixture using 200 kHz/13.56 MHz dual frequency excitation

Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge

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Atmospheric-pressure diffuse dielectric barrier discharges in Ar/O₂gas mixture using 200 kHz/13.56 MHz dual frequency excitation