1960
DOI: 10.1063/1.1735785
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On the Flow of a Non-Newtonian Liquid on a Rotating Disk

Abstract: The equations describing the flow of a power-law non-Newtonian fluid on a rotating disk have been solved in general form. This makes it possible to calculate how the shape of an initial surface contour will vary with time and to investigate the possibility of producing uniform films by applying the materials to a rapidly spinning disk. It is shown that the latter process, which has potential industrial applications, has a much better chance of succeeding if the fluid is Newtonian than if it is not, in the sens… Show more

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Cited by 176 publications
(84 citation statements)
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“…To account for evaporation, Meyerhofer 2 included a correction based on the assumption that the spin-coating process consists of two different stages: (a) a ow dominated phase followed by (b) an evaporation dominated phase. There are reports 19,20 that further characterize the uid ow of non-Newtonian liquids. Later on, Cregan and O'Brien 21 considered that the solvent evaporation is simultaneous with the ow dominated phase because the solvent starts to evaporate once the suspension is pipetted on to the spinning substrate.…”
Section: Previous Resultsmentioning
confidence: 99%
“…To account for evaporation, Meyerhofer 2 included a correction based on the assumption that the spin-coating process consists of two different stages: (a) a ow dominated phase followed by (b) an evaporation dominated phase. There are reports 19,20 that further characterize the uid ow of non-Newtonian liquids. Later on, Cregan and O'Brien 21 considered that the solvent evaporation is simultaneous with the ow dominated phase because the solvent starts to evaporate once the suspension is pipetted on to the spinning substrate.…”
Section: Previous Resultsmentioning
confidence: 99%
“…Because of its industrial and technological relevance, liquid film planarization during spin coating has been the focus of numerous theoretical studies. [1][2][3][4] It is quite common for capillary bumps to occur during the coating process, especially in the vicinity of sharp edges on substrate features such as steps, trenches, and mounds. Stillwagon and Larson 5,6 examined the leveling and flow of epoxy and photoresist films over a silicon substrate containing axisymmetric trenches and compared the profilometric measurements to the results from a lubrication model.…”
Section: Introductionmentioning
confidence: 99%
“…This pioneering work has been widely employed in the subsequent investigations on spin coating. For example, Acrivos et al [2], Jenekhe and Schuldt [3] extended the analysis of Emslie [1] to study the flow of a power-law liquid on a rotating disk. Whereas Charpin et al [4] investigated the axisymmetric spin coating of power law and Ellis fluids.…”
Section: Introductionmentioning
confidence: 99%