On the extraction of resistivity and area of nanoscale interconnect lines by temperature-dependent resistance measurements

Adelmann, Christoph

doi:10.1016/j.sse.2018.12.005

Cited by 15 publications

(7 citation statements)

References 56 publications

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“…For example, it was hypothesized that softening occurs for surface phonon modes, leading to reduced Debye temperatures. 49,50,57,61 This is, however, inconsistent with the mechanical property measurement of silver nanowires documenting significant elastic stiffening with enhanced Young's moduli.…”

Section: 𝐹"𝑤 ℎ 𝑙contrasting

confidence: 63%

From nanowires to super heat conductors

Yang

Prasher

2021

Journal of Applied Physics

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Thermal transport through various nanowires has attracted extensive attention in the past two decades. Nanowires provide an excellent platform to dissect phonon transport physics because one can change the wire size to impose systematically varying boundary conditions that can help to distinguish the contributions of various scattering mechanisms. Moreover, novel confinement phenomena beyond the classical size effect promise opportunities to achieve highly desirable properties. Based on a summary of research progresses in nanowire thermal properties, we discuss more intriguing observations due to the classical size effect, coupling between mechanical and thermal properties, and divergent thermal conductivity as a result of conversion from threedimensional to one-dimensional phonon transport, showcasing the superdiffusive thermal transport phenomenon as predicted by Fermi, Pasta, Ulam, and Tsingou in 1955. We hope that these discussions could provide a new perspective on further exploring thermal transport in nanowires, which may eventually lead to breakthroughs such as achieving thermal conductivity values higher than that of any known materials.

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Section: 𝐹"𝑤 ℎ 𝑙contrasting

confidence: 63%

From nanowires to super heat conductors

Yang

Prasher

2021

Journal of Applied Physics

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“…The product of the electron mean free path and the bulk resistivity is assumed to be independent of temperature as it is a function of the morphology of the Fermi surface; thus, the product of l r T T 0 ( ) ( ) is taken as a constant value (Mayadas et al 1969, Adelmann 2019, Siniscalchi et al 2020.…”

Section: Resultsmentioning

confidence: 99%

“…Consideration of metallic film TCR is also germane to the performance of scaled integrated circuits, which are subject to reduced feature sizes and increased power densities (Baklanov et al 2014, Ren et al 2018. A number of prior works have investigated thickness effects on the temperature coefficient of thin metal films, including, for example, (Zhang et al 2004, Camacho and Oliva 2006, Zhang et al 2006, Chuang et al 2016, Adelmann 2019, Siniscalchi et al 2020. The size dependence of the electrical properties of Cu have been of particular interest as scaling of interconnect lines poses future challenges to overall device and circuit performance (King 2014, Misják et al 2014, Dutta et al 2017a, Croes et al 2018, Debroy et al 2020.…”

Section: Introductionmentioning

confidence: 99%

Comparative analysis of the sensitivity of nanometallic thin film thermometers

Scott¹,

Carow²,

Pete³

et al. 2022

Nanotechnology

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Thin film platinum resistive thermometers are conventionally applied for resistance thermometry techniques due to their stability and proven measurement accuracy. Depending upon the required thermometer thickness and temperature measurement, however, performance benefits can be realized through the application of alternative nanometallic thin films. Herein, a comparative experimental analysis is provided on the performance of nanometallic thin film thermometers most relevant to microelectronics and thermal sensing applications: Al, Au, Cu, and Pt. Sensitivity is assessed through the temperature coefficient of resistance, measured over a range of 10–300 K for thicknesses nominally spanning 25–200 nm. The interplay of electron scattering sources, which give rise to the temperature-dependent TCR properties for each metal, are analyzed in the framework of a Mayadas–Shatzkes based model. Despite the prevalence of evaporated Pt thin film thermometers, Au and Cu films fabricated in a similar manner may provide enhanced sensitivity depending upon thickness. These results may serve as a guide as the movement toward smaller measurement platforms necessitates the use of smaller, thinner metallic resistance thermometers.

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“…Incorporating the influence of temperature, Equation (15) transforms to Equation (16) [ 57 ].

T is temperature.…”

Section: Resultsmentioning

confidence: 99%

Analyses of the Effects of Electrolyte and Electrode Thickness on High Temperature Proton Exchange Membrane Fuel Cell (H-TPEMFC) Quality

2022

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Researchers have been striving to minimize proton exchange membrane fuel cell components thickness. This is believed to reduce the losses (active losses, ohmic losses and mass transfer losses) associated with this cell. In this study, we numerically analyze the electrodes and electrolyte thickness effects on high-temperature proton exchange membrane fuel cell (H-TPEMFC) performance. COMSOL Multiphysics is adopted to model both the impedance spectroscopy and polarization of the cell. Increased cell catalyst layer (thick electrode) improves the overall cell performance by ±10%, because of the improved reaction rate. It presents 0.89 mol m−3 lesser oxygen compared to that of the thin electrode cell. On the contrary, thick cell electrodes come with increased mass transport loss. The high reaction rate is also confirmed by the high amount of generated water, which is 0.42 mol m−3 higher than that of thin electrode cell. The experiment used to set the modeling parameter renders results with only less than 5% discrepancy to the modeling results. Also revealed is that over a limited range, electrolytes thickness variation has negligible effects on H-TPEMFC performance.

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On the extraction of resistivity and area of nanoscale interconnect lines by temperature-dependent resistance measurements

Cited by 15 publications

References 56 publications

From nanowires to super heat conductors

From nanowires to super heat conductors

Comparative analysis of the sensitivity of nanometallic thin film thermometers

Analyses of the Effects of Electrolyte and Electrode Thickness on High Temperature Proton Exchange Membrane Fuel Cell (H-TPEMFC) Quality

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