Abstract:In this work the capability of the proton induced X-ray emission (PIXE) technique to monitor a rapid, non-destructive and accurate quantification of Al on or inside SiC is discussed. Optimization of PIXE acquisition parameters was performed using as reference, a thin Al film (2.5 nm) thermally evaporated onto silicon carbide substrate. In order to improve the sensitivity for Al detection and quantitative determination, a systematic study was undertaken using proton ion beam at different energies (from 0.2 to 3… Show more
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