On the calibration of low-energy ion accelerators

Lennard, W.N.; Tong, S. Y.; Massoumi, G.R.; Wong, Lola

doi:10.1016/0168-583x(90)90835-i

Cited by 18 publications

(23 citation statements)

References 9 publications

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“…Diode particle detectors have an entrance window consisting of one electrode of the diode and any surface dead layer (the sub-electrode highly-doped region from which no charge can be collected). The PHD combines the energy lost by the incident particle in this dead layer together with the energy lost by the particle to non-ionising nuclear displacements [61]. Figure 1 shows the effect of ignoring the detector PHD.…”

Section: Traceability Of Rbs: Uncertainty Budgetmentioning

confidence: 99%

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Accurate Determination of Quantity of Material in Thin Films by Rutherford Backscattering Spectrometry

2012

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Ion beam analysis (IBA) is a cluster of techniques including Rutherford and non-Rutherford backscattering spectrometry, and particle-induced X-ray emission (PIXE). Recently, the ability to treat multiple IBA techniques (including PIXE) self-consistently has been demonstrated. The utility of IBA for accurately depth profiling thin films is critically reviewed. As an important example of IBA, three laboratories have independently measured a silicon sample implanted with a fluence of nominally 5.1015As/cm2 at an unprecedented absolute accuracy. Using 1.5 MeV 4He+ Rutherford backscattering spectrometry (RBS), each lab has demonstrated a combined standard uncertainty around 1% (coverage factor k=1) traceable to an Sb-implanted certified reference material through the silicon electronic stopping power. The uncertainty budget shows that this accuracy is dominated by the knowledge of the electronic stopping, but that special care must also be taken to accurately determine the electronic gain of the detection system and other parameters. This RBS method is quite general and can be used routinely, to accurately validate ion implanter charge collection systems, to certify SIMS standards, and for other applications. The generality of application of such methods in IBA is emphasised: if RBS and PIXE data are analysed self-consistently then the resulting depth profile inherits the accuracy and depth resolution of RBS and the sensitivity and elemental discrimination of PIXE

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Section: Traceability Of Rbs: Uncertainty Budgetmentioning

confidence: 99%

“…The measured pile-up was rather low due to the use of pileup rejection and the modest count rate. The detector dead layers are measured directly by tilting them in front of an 241 Am source [61]. The beam energy is calibrated directly against the 16 O(α,α) 16 O resonance at 3038 keV.…”

Section: Measurementsmentioning

confidence: 99%

Accurate Determination of Quantity of Material in Thin Films by Rutherford Backscattering Spectrometry

2012

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“…It was 99.9% pure (impurity mostly Fe), 25x25 mm, 0.25 mm thick, as rolled. The surface oxide and carbon contamination was evaluated (see The electronics calibration was made with a Au/Ni/SiO 2 /Si sample (see [19]), using Lennard's pulse height defect (PHD) correction for the non-ionising energy loss [20] and an assumed surface electrode thickness of (246, 100).10 15 The DataFurnace code (NDFv8.1h) [24,25] was used to calculate the spectra from the excitation function. Unless both the straggling and the convolution of the straggling and the crosssection function are accounted for, the spectral shape for buried resonances will not be reproduced.…”

Section: Benchmark Measurementsmentioning

confidence: 99%

Evaluation of non-Rutherford proton elastic scattering cross-section for magnesium

Gurbich¹,

Jeynes²

2007

Nuclear Instruments and Methods in Physics Research Section B:

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The experimental data available for magnesium (p,p) elastic scattering cross section at angles and energies suitable for Ion Beam Analysis have been evaluated using the theoretical model approach together with additional measurements and benchmark experiments. The results obtained provide the evaluated differential cross sections for magnesium (p,p) elastic scattering in the energy region up to 2.7 MeV.

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“…The pulse-height response of such detectors is proportional only to that part of the particle energy that is converted to electron-hole pairs in the active region of the detector, but some of the particle energy is also lost both at the entrance window and into the nuclear displacements which are not converted to electron-hole pairs. This is known as the pulse-height defect (PHD) which, as Figure 3 shows, varies quite strongly with energy 20,27 and is not quite the same as a simple offset strictly independent of energy. The PHD must be taken into account for properly interpreting the RBS spectra.…”

mentioning

confidence: 99%

“…The RBS spectra were fitted using the DataFurnace code 13 , and also the pulseheight defect (PHD) correction of Pascual-Izarra & Barradas 19 which uses Lennard's calculation of the non-ionising energy loss 20 .…”

mentioning

confidence: 99%